基于环氧复制法的光学反射镜制备技术研究  

Fabrication of optical mirrors by epoxy replication

作　　者：张颖[1,2] 刘红 陈小安[1] 闵攀[1] 罗瑞 Zhang Ying;Liu Hong*;Chen Xiaoan;Min Pan;Luo Rui(Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu,Sichuan 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院光电技术研究所,四川成都610209 [2]中国科学院大学,北京100049

出　　处：《光电工程》2021年第8期19-30,共12页Opto-Electronic Engineering

摘　　要：环氧复制法利用环氧树脂将抛光母模的高精度表面复制至镜坯,这是一种高效率低成本制备光学反射镜的方法。由于树脂的材料特性,复制面形精度随着反射镜口径的增大而迅速降低,并且在脱模后没有有效的面形精修方法。本文首先利用有限元分析方法仿真了环氧复制过程,提出了一种针对母模的优化设计方法,提高了环氧复制法的精度。然后研制了一种具有多层结构的金属薄膜,利用磁流变修形技术将复制后的薄膜表面加工至更高的面形精度。最后利用环氧复制法分别在5天和10天内制备了Φ180 mm抛物面反射镜和Φ500 mm平面反射镜,面形RMS均小于20 nm,表面粗糙度Rq均为0.6 nm。The master,which contains the desired optical surface,is epoxied to the substrate.When the pieces are separated,the epoxy resin layer is transferred to the substrate producing a replicated mirror.Epoxy replication is an efficient and low-cost way to fabricate optical mirrors.The surface figure accuracy will decrease with the increase in mirror size due to the characteristic of the epoxy resin,and there is no effective way to correct the surface figure aberrations after replication.Finite element analysis was used to simulate the replication process and optimize the thickness of the master for better surface figure accuracy.A multilayer film compatible with Magneto-Rheological Fi-nishing was also developed.A parabolic replicated mirror with a diameter ofΦ180 mm and a plane replicated mirror with a diameter ofΦ500 mm were fabricated within 5 and 10 days,respectively.The precision shape(RMS<20 nm)and low surface roughness(Rq=0.6 nm)were both achieved.

关 键 词：环氧复制 反射镜 面形 光学加工 

分 类 号：TH74[机械工程—光学工程]