Reversible and controllable threshold voltage modulation for n-channel MoS2 and p-channel MoTe_(2 )field-effect transistors via multiple counter doping with ODTS/poly-L-lysine charge enhancers  

作　　者：Seung Gi Seo Jinheon Jeong Seung Yeob Kim Ajit Kumar Sung Hun Jin 

机构地区：[1]Department of Electronic Engineering,Incheon National University,Academy-ro 119,Yeongsu-gu,Incheon 22012,Republic of Korea

出　　处：《Nano Research》2021年第9期3214-3227,共14页纳米研究（英文版）

基　　金：supported by the Priority Research Centers Program through the National Research Foundation of Korea(NRF);funded by the Ministry of Education(No.NRF-2020R1A6A1A03041954);partly supported by(i)the Basic Science Research Program through the National Research Foundation of Korea(NRF);funded by the Ministry of Education(No.NRF-2019R1F1A1062767)and by(ii)the National Research Foundation of Korea(NRF);funded by the Ministry of Science,ICT and Future Planning(No.NRF-2021R1A2C1012593).

摘　　要：Confronted by the inherent physical limitations in scaling down Si technology,transition metal dichalcogenides(TMDCs)as alternatives are being tremendously researched and paid attention to.However,mature counter doping technology for TMDCs is still elusive,and thus,a controllable and reversible charge enhancer is adopted for acceptor(or donor)-like doping via octadecyltrichlorosilane(ODTS)(or poly-L-lysine(PLL))treatment.Furthermore,multiple counter doping for TMDC field-effect transistors(FETs),combined with a threshold voltage(V;h)freezing scheme,renders the V_(th) modulation controllable,with negligible degradation and decent sustainability of FETs even after each treatment of a representative charge enhancer.In parallel,the counter doping mechanism is systematically investigated via photoluminescence spectroscopy,X-ray photoelectron spectroscopy,atomic force microscopy(AFM),surface energy characterization,and measurement of optoelectronic properties under illumination with light of various wavelengths.More impressively,complementary inverters,composed of type-converted molybdenum ditelluride(MoTe_(2)>FETs and hetero-TMDC FETs in enhancement mode,are demonstrated via respective ODTS/PLL treatments.Herein,driving backplane application for micro-light-emitting diode(p-LED)displays and physical validation of a corresponding counter doping scheme even for flexible polyethylene terephthalate(PET)substrates could be leveraged to relieve daunting challenges in the application of nanoscale Si-based three-dimensional(3D)stacked systems,with potential adoption of ultralow power and monolithic optical interconnection technology.

关 键 词：transition metal dichalcogenides(TMDCs) counter doping charge enhancer field-effect transistors micro-light-emitting diode(m-LED) 

分 类 号：TN386[电子电信—物理电子学]