Construction of high-performance magnetic sensor based on anisotropic magnetoresistance Ta/MgO/NiFe/MgO/Ta film  

作　　者：Yue-Dou Pan Ling-Ran Yu Lei Wang Tao Chen Xin-Ya Wei Rong-Gui Zhu Jian-Wei Li Chun Feng Guang-Hua Yu 

机构地区：[1]School of Automation and Electrical Engineering,University of Science and Technology Beijing,Beijing,100083,China [2]School of Materials Science and Engineering,University of Science and Technology Beijing,Beijing,100083,China [3]School of Chemical Engineering and Technology,Tianjin University,Tianjin,300072,China

出　　处：《Rare Metals》2021年第8期2026-2032,共7页稀有金属（英文版）

基　　金：financially supported by the National Key Research and Development Program of China(Nos.2019YFB2005800 and 2019YFB1309902);the National Science Foundation of China(Nos.51871017 and 51871018);Beijing Natural Science Foundation(No.2192031);the Science and Technology Innovation Team Program of Foshan(No.FSOAA-KJ919-44020087);the Fundamental Research Funds for the Central Universities(No.FRF-TP-19-011B1);the Foundation of Beijing Key Laboratory of Metallic Materials and Processing for Modern Transportation。

摘　　要：The anisotropic magnetoresistance film is an important core material for developing the magnetic sensors.Here,Ta(5)/Mg O(3)/Ni Fe(10)/Mg O(3)/Ta(3)multilayers(in nanometer)were prepared by magnetron sputtering and further applied to construct a sensor element by combining with the Wheatstone bridge.The 1/f noise of the sensor element was greatly reduced by three orders of magnitude after annealing at 400℃for 7200 s,which was mainly due to the significant microstructural changes during the annealing.However,when the sensor element was applied to detect the magnetic signal of a magnetic code disk with 512 N-S magnetic poles,the output voltage signal of the sensor displayed a large fluctuation of±0.05 V.In order to reduce the voltage fluctuation,a magnetic sensor chip by using a parallelly arranged multipath Wheatstone bridges and auto-gain compensation structure was designed,and magnetic sensor elements and the high-performance computing drive module were prepared.The output voltage fluctuation of the magnetic sensor was reduced by about 90%and approached to±0.005 V.These findings provide an important basis for the practical application of Ni Fe-based magnetic sensing film materials.

关 键 词：Magnetic sensor Anisotropic magnetoresistance PERMALLOY Multi-channel spatially parallel Wheatstone bridge Auto-gain compensation 

分 类 号：TP212.13[自动化与计算机技术—检测技术与自动化装置] TB383.2[自动化与计算机技术—控制科学与工程]