两种玻璃微通道阵列的制作技术及比较  

Two kinds of making technologies of glass micro-channel arrays and their comparison

作　　者：王亚丽 崔开源 刘术林[2,3] 张骞 栗重浩 李晓峰 WANG Yali;CUI Kaiyuan;LIU Shulin;ZHANG Qian;LI Chonghao;LI Xiaofeng(Taiyuan Great Wall Low-Light Micro-Channel Electronic Technology Co.,Ltd.,Taiyuan 030032,China;State Key Laboratory of Nuclear Detection and Nuclear Electronics,Institute of High Energy Physics,Chinese Academy of Sciences,Beijing 100049,China;University of Chinese Academy of Sciences,Beijing 100049,China;North Night Vision Technology Co.,Ltd.,Kunming 650217,China)

机构地区：[1]太原长城微光微通电子科技有限公司,山西太原030032 [2]核探测与核电子学国家重点实验室,中国科学院高能物理研究所,北京100049 [3]中国科学院大学,北京100049 [4]北方夜视技术股份有限公司,云南昆明650217

出　　处：《应用光学》2021年第5期796-801,共6页Journal of Applied Optics

基　　金：国家自然科学基金(11535014);核探测与核电子学国家重点实验室项目(SKLPDE-ZZ-202102)。

摘　　要：微孔玻璃阵列是采用原子层沉积技术制作微通道板的基底板,其微孔阵列的分布均匀性以及每个通道内壁的光滑程度,对其后续制作合格微通道板至关重要。分别采用空芯工艺和实芯腐蚀工艺来制作上述基底板,分析了两种技术的优缺点,阐述了两种方法中的关键技术,并对原子沉积技术制作的微通道板与常规工艺制作的微通道板进行了性能比较,前者的信噪比优于后者。The micro-pore glass array is the base plate of the micro-channel plate made by atomic-layer deposition technology.The distribution uniformity of the micro-pore array and the smoothness of the inner wall of each channel are very important for the subsequent fabrication of qualified micro-channel plates.The hollow-core and solid-core corrosion processes were used respectively to make the aforementioned base plate.The advantages and disadvantages of the two processes were deeply analyzed,and the key technologies of the two processes were expounded.The performance of the micro-channel plate made by atomic-layer deposition technology was compared with that made by conventional technology,and the signal-to-noise ratio of the former was better than that of the latter.

关 键 词：微孔玻璃阵列 微通道板 原子层沉积技术 空芯法 实芯法 均匀性 内壁粗糙度 信噪比 

分 类 号：TN223[电子电信—物理电子学]