红外探测器薄壳杜瓦组件的瞬态钎焊热场分析  

Investigation on Time-dependent Thermal Field in Vacuum Blazing for Thin-shell Dewar Components of Infrared Detector

作　　者：王成君 杨晓东 靳丽岩 胡北辰 夏丹[2] 苏春[2] WANG Chengjun;YANG Xiaodong;JIN Liyan;HU Beichen;XIA Dan;SU Chun(The 2nd Research Institute of CETC,Taiyuan 030024,China;School of Mechanical Engineering,Southeast University,Nanjing 211189,China)

机构地区：[1]中国电子科技集团公司第二研究所,山西太原030024 [2]东南大学机械工程学院,江苏南京211189

出　　处：《电子工艺技术》2021年第5期267-270,共4页Electronics Process Technology

基　　金：科工局基础科研项目。

摘　　要：制冷型红外探测器是航天领域广泛应用的重要电子器件,主要由半导体芯片、杜瓦组件、制冷器等部件构成。其中薄壳杜瓦组件用于创造探测器内部的真空隔热环境,从而维持器件的低温工作。薄壳杜瓦组件是通过真空钎焊的方式加工生产的,设计合理的钎焊热场可预防零件形变、提高加工一致性,从而提升器件良率。对于机械强度较差的薄壳类零件,除稳态热场温度分布以外,还需深入研究瞬态温度均匀性。利用有限元仿真技术,以升温过程为例开展钎焊过程温度场演变规律分析;结合仿真与实际测试,实现薄壳类零件钎焊形变<0.05 mm。结果表明,优化后的真空钎焊设备瞬态温度均匀性满足薄壳类零件的低形变钎焊需求。此外,仿真结果为此类设备的设计及瞬态热场分析提供了依据与参考。Cryogenic infrared detector is an important electronic device widely used in aerospace industry,it is mainly composed of semiconductor chips,Dewar components,and cryocoolers.The thin-shell Dewar component is used to create a low-pressure and heat-insulating environment inside detectors to work at low temperature.The thin-shell Dewar component is manufactured by vacuum blazing.Well-designed blazing temperature field can prevent deformation and improve manufacturing uniformity of the thin-shells,thus promoting the yield of the devices.For thin-shell parts with poor mechanical strength,the temperature uniformity of time-dependent thermal field should be studied in addition to the steady-state process.The evolution of blazing thermal field is analyzed with finite element simulation method.Combining simulation with actual experiments,the deformation of thin-shell component is less than 0.05 mm after blazing.The results show that the optimized time-dependent temperature uniformity of the equipment meets the requirement of vacuum blazing of thin-shell components with low deformation.Besides,the simulation results provide the basis and reference for the design and time-dependent analysis of relevant equipment.

关 键 词：薄壳杜瓦组件 瞬态热场 真空钎焊 有限元分析 

分 类 号：TN215[电子电信—物理电子学]