光电微系统技术发展综述  

Development of optoelectronic microsystem technology

作　　者：崔大圣 刘峰 王璇 文艺 CUI Dasheng;LIU Feng;WANG Xuan;WEN Yi(Beijing Research Institute of Telemetry,Beijing 100076,China;Beijing Institute of Astronautical Systems Engineering,Beijing 100076,China)

机构地区：[1]北京遥测技术研究所,北京100076 [2]北京宇航系统工程研究所,北京100076

出　　处：《遥测遥控》2021年第5期28-42,共15页Journal of Telemetry,Tracking and Command

摘　　要：光电微系统具有探测精度高、处理速度快、传输通量大等优势,在信息传输、目标探测和光子处理等方面具有广泛应用。本文综合国内外光电微系统产品和技术现状,重点从信息传输、目标探测和光子处理三个方面展开叙述,讨论了激光器、调制器、波导等光电器件,并对三维集成技术和光电微系统平台进行简介。简述了国内外有关光电微系统的发展计划,提出了国内发展独立的微系统平台和相关技术的迫切性和必要性。The optoelectronic microsystem with the advantages of high detection accuracy,fast processing speed and large transmission flux,has been widely used in information transmission,target detection and photon processing.Based on the current situation of optoelectronic microsystem products and technologies at home and abroad,this paper focuses on information transmission,target detection and photon processing,discusses optoelectronic devices such as lasers,modulators and waveguides,and briefly introduces three-dimensional integration technology and optoelectronic microsystem platform.The development plans of photoelectric microsystem at home and abroad are briefly described,and the urgency and necessity of developing independent microsystem platform and related technologies in China are put forward.

关 键 词：光电微系统 三维集成 光电器件 

分 类 号：TN29[电子电信—物理电子学]