基于BaTiO_(3)@PMMA核壳材料的薄膜电容器介电层  

Dielectric Layer of Thin Film Capacitors Based on BaTiO_(3) @PMMA Core-Shell Materials

作　　者：周顺风 张婕 Zhou Shunfeng;Zhang Jie(School of Mechanical Engineering,Jiangnan University,Wuxi 214122,China;Jiangsu State Key Lab of Advanced Food Manufacturing and Equipment,Jiangnan University,Wuxi 214122,China)

机构地区：[1]江南大学机械工程学院,江苏无锡214122 [2]江南大学江苏省食品先进制造与装备重点实验室,江苏无锡214122

出　　处：《微纳电子技术》2021年第9期776-782,共7页Micronanoelectronic Technology

基　　金：江苏省产业前瞻与共性关键技术资助项目(BF2017069);中央高校基本科研基金资助项目(JUSRP11946)。

摘　　要：聚合物基纳米复合材料具有高相对介电常数和良好机械性能,在柔性印刷电子领域应用广泛,广阔的市场需求也对其性能提出了越来越高的要求。采用原位聚合法制备了核壳结构的BaTiO_(3)@PMMA复合材料,提高了BaTiO_(3)颗粒在PMMA基体中的分散性,减少了纳米颗粒的团聚。通过旋涂法在柔性铜膜上制备了BaTiO_(3)@PMMA高相对介电常数介电层,并在此基础上制作了柔性薄膜电容器。对制备的介电薄膜进行表征,结果表明制备的介电薄膜具有良好的均一性,介电薄膜的表面随着BaTiO_(3)质量分数的增加而变得粗糙。薄膜的相对介电常数在10 Hz~1 MHz的频率内展现出良好的频率稳定性。随着BaTiO_(3)质量分数的增加,薄膜的相对介电常数逐渐增加,质量分数30%BaTiO_(3)的薄膜相对介电常数最大(23.53),约为纯PMMA薄膜相对介电常数(2.5)的10倍。Polymer-based nanocomposites are widely used in the field of flexible printing electro-nics due to their high relative dielectric constant and good mechanical properties.Broad market demand also put forward higher requirements for their performances.BaTiO_(3)@PMMA compo-sites with the core-shell structure were prepared by in-situ polymerization method,the dispersion of BaTiO_(3) particles in PMMA matrix was improved,the agglomeration of the nanoparticles was reduced.The BaTiO_(3)@PMMA dielectric layer with high relative dielectric constant was prepared on the flexible copper film by spin coating method.On this basis,the flexible film capacitor was fabricated.The prepared dielectric film was characterized.The results show that the prepared dielectric film has good uniformity,the surface of the dielectric film becomes rough with the increase of BaTiO_(3) mass fraction.The relative dielectric constant of the film shows good frequency stability in the frequency range of 10 Hz-1 MHz.With the increase of BaTiO_(3) mass fraction,the relative dielectric constant of the film increases gradually.The film with a BaTiO_(3) mass fraction of 30%has the largest relative dielectric constant(23.53),which is about 10 times that of the pure PMMA film(2.5).

关 键 词：高相对介电常数 薄膜电容器 纳米复合材料 原位聚合 核壳结构 

分 类 号：TB333[一般工业技术—材料科学与工程]