基于摩擦纳米发电机的气体流量传感器  

Gas Flow Sensor Based on Triboelectric Nanogenerator

作　　者：韩阳 黄河 赵世昌 吴川[4] 宋尧 钱俊国 李佩泽 Han Yang;Huang He;Zhao Shichang;Wu Chuan;Song Yao;Qian Junguo;Li Peize(State Grid Hebei Electric Power Con struction Co.,Ltd.,Shijiazhuang 050000,China;Powerchina Hubei Electric Engineering Co.,Ltd.,Wuhan 430040,China;State Grid Hebei Electric Power Co.,Ltd.,Shijiazhuang 050000,China;Facult y of Mechanical and Electronic Information,China University of Geosciences(Wuhan),Wuhan 430074,China)

机构地区：[1]国网河北省电力有限公司建设公司,石家庄050000 [2]湖北省电力勘测设计院有限公司,武汉430040 [3]国网河北省电力有限公司,石家庄050000 [4]中国地质大学(武汉)机械与电子信息学院,武汉430074

出　　处：《微纳电子技术》2021年第9期804-811,850,共9页Micronanoelectronic Technology

基　　金：国家重点研发计划资助项目(2018YFC0603400);国家电网有限公司科技项目(2019076362)。

摘　　要：气体流量是工农业生产及科学研究的重要控制参数,有必要进行实时测量。基于摩擦纳米发电机研制了一种具有自供电功能的气体流量传感器。传感器在气体流经时产生摩擦起电,从而输出与气体流量呈正比的摩擦电信号,实现自供电式传感,即传感器具有传感器和发电机的双重功能。对传感器的理论输出信号进行了推导建模。实验结果表明,传感器的测量范围为20~100 mL/s,测量误差<3%,且最高工作环境温度≤150℃。传感器的发电实验显示其最大输出电压和电流分别为3.2 V和3.2×10^(-6)A,且当外接负载为106Ω时可达最大输出功率为2.8×10^(-6)W。此外,还对现场实验数据存在较大干扰信号时的数据处理方法进行了研究。与现有的气体流量传感器相比,所设计的传感器为自供电式传感器,无需外接电源便可工作,因此将更加适宜野外分布式的工况环境。Gas flow is an important control parameter for industrial and agricultural production and scientific research,so it is necessary to be measured in real-time.A gas flow sensor with self-powered function was developed based on a triboelectric nanogenerator.The sensor generates triboelectrification when the gas flowed through,thus outputs a triboelectric signal proportional to the gas flow to realize the sensing function in self-powered,i.e.the sensor has the dual functions of sensor and generator.The theoretical output signal of the sensor was derived and modeled.The test results show that the measurement range of the sensor is 20-100 mL/s,the measurement error is less than 3%,and the maximum working environment temperature is not greater than 150℃.The power generation experiment shows that the maximum output voltage and current of the sensor are 3.2 V and 3.2×10^(-6)A,respectively,and the maximum output power is 2.8×10^(-6)W when the external load is 106Ω.In addition,the data processing method of field experiment data with large interference signals was also studied.Compared with the existing gas flow sensors,the designed sensor is a self-powered sensor and can work without an external power supply,so it will be more suitable for the distributed working environment in the field.

关 键 词：传感器 摩擦纳米发电机 气体流量 摩擦起电 自供电功能 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH703[自动化与计算机技术—控制科学与工程]