迫流冷却式低温吸附泵抽气性能测试系统设计  

Design of test system for pumping property of a forced-flow-cooling cryogenic adsorption pump

作　　者：张进新 鲁祥友 谢远来 胡纯栋[2] 郎嘉琪 Zhang Jinxin;Lu Xiangyou;Xie Yuanlai;Hu Chundong;Lang Jiaqi(School of Environmental and Energy Engineering,Anhui Jianzhu University,Hefei 230601,China;Institute of Plasma Physics,Hefei Institute of Material Science,Chinese Academy of Sciences,Hefei 230031,China)

机构地区：[1]安徽建筑大学环境与能源工程学院,合肥230601 [2]中国科学院合肥物质科学研究院等离子体物理研究所,合肥230031

出　　处：《低温与超导》2021年第8期44-48,共5页Cryogenics and Superconductivity

基　　金：国家重点基础研究发展计划(2017yfe0300103)资助。

摘　　要：为检验中国聚变工程实验堆负离子源中性束注入系统样机低温吸附泵的抽气性能,结合流量计法抽速测试罩设计了一套抽气性能测试系统。通过Molflow软件对不同进气量下抽速测试罩内的压力变化进行了分析,结果表明低温吸附泵对被抽气体抽速稳定且与理论抽速相比误差为3.8%,误差在允许范围之内,从而验证了该抽气性能测试系统的合理性。In order to verify the property of the cryogenic adsorption pump, which was designed for the technology demonstration prototype of negative ion based neutral beam injection system for the China Fusion Engineering Test Reactor(CFETR),a set of pumping performance test system was designed on the basis of the single dome to measure pumping speed by flow-meter.The pressure variation under different gas dosings was analyzed by Molflow software.The results show that the pumping speed of the cryogenic adsorption pump obtained by simulation maintains nearly constant for specific pumped gas and compared with theoretical pumping speed, the deviation is 3.8 % within the allowable range.It is indicated that the design of the pumping performance test system is reasonable.

关 键 词：低温吸附泵 Molflow 性能测试系统 流量计法抽速测试罩 

分 类 号：TB7[一般工业技术—真空技术]