具有温度补偿的高精度FBG微位移传感器的设计、制作及性能研究  

Design,Fabrication and Performance Research of a High Precision FBG Micro-displacement Sensor with Temperature Compensation

作　　者：陈振威 陈焕权 史雯慧 李建宇 郑加金[1,2] 韦玮 CHEN Zhenwei;CHEN Huanquan;SHI Wenhui;LI Jianyu;ZHENG Jiajin;WEI Wei(College of Electronic and Optical Engineering,College of Microelectronics,Nanjing University of Posts and Telecommunications,Nanjing 210023,China;Jiangsu Province Engineering Research Center for Fabrication and Application of Special Optical Fiber Materials and Devices,Nanjing 210023,China)

机构地区：[1]南京邮电大学电子与光学工程学院,微电子学院,南京210023 [2]江苏省特种光纤材料与器件制备及应用工程研究中心,南京210023

出　　处：《光子学报》2021年第9期116-124,共9页Acta Photonica Sinica

基　　金：国家自然科学基金(No.62075100)。

摘　　要：为克服现有光纤布拉格光栅传感器设计结构复杂、温补误差大等缺陷,设计并制作了一种基于弹簧与滑块相结合的结构简单且高精度光纤布拉格光栅位移传感器,在一根光纤上获得温度补偿的同时,实现了高精度微位移测量,极大的减小了空间占用。实验结果表明:该传感器具有优良的微位移测量能力,灵敏度为145.08 pm/mm,精度为1.43%,量程为10 mm;静态综合相对误差为2.88%,整体的线性度、重复性和迟滞性误差较小。比较铝合金衬底、石英衬底和无衬底的温补效果,发现石英衬底的传感器温度补偿效果更佳,其延迟时间从6.8 min下降到4.3 min,最大温度补偿误差从44 pm减少至40 pm。最终采用石英玻璃作为衬底制成的传感器温度灵敏度为6.34 pm/℃,温补误差为0.26%。本文研制的传感器有望用于机械装备和土木工程等高精度结构位移的在线监测。A high-precision Fiber Bragg Grating(FBG)displacement sensor was proposed based on the combination of a spring and a slider.It can realize the displacement measurement and temperature compensation on a single fiber,which greatly reduces space occupation.Experimental results show that the sensor has excellent micro-displacement measurement capability,its sensitivity,accuracy and the range are 145.08 pm/mm,1.43%,1.55%and 10 mm,respectively.The relative error of static synthesis is 2.88%,and the overall error of linearity,repeatability and hysteresis are small.By comparing the temperature compensation effect of aluminum alloy substrate,non-substrate and quartz substrate,it is found that the sensor temperature compensation effect of quartz substrate is better which the delay time is reduced from 6.8 min to 4.3 min,and the maximum temperature compensation error is reduced from 44 pm to 40 pm.Finally,the temperature sensitivity of the sensor made of quartz glass substrate is 6.34 PM/℃and the temperature compensation error is 0.26%.All of those implies the sensor is suitable for online monitoring of high-precision structural displacements such as mechanical equipment and civil engineering.

关 键 词：光纤布拉格光栅 光纤传感器 位移传感器 高精度 温度补偿 

分 类 号：TN253[电子电信—物理电子学]