电极几何尺寸误差对纳米时栅位移传感器测量精度的影响及其抑制方法  

Influence of electrode geometric errors on the measurement accuracy of nanometer time-grating displacement sensor and its suppression method

作　　者：彭凯[1] 刘小康[1] 于治成 王合文 蒲红吉[1] Peng Kai;Liu Xiaokang;Yu Zhicheng;Wang Hewen;Pu Hongji(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054

出　　处：《仪器仪表学报》2021年第7期21-27,共7页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(51905063);重庆市教委科学技术研究(KJQN201801127,KJQN202001133)项目资助。

摘　　要：在纳米时栅传感器的制造过程中,由加工工艺引入的制造误差主要表现为电极几何尺寸误差。通过运用分段面积积分方法进行数学建模,详细地分析了电极几何尺寸误差对测量精度的影响,并揭示了采用多个感应电极进行信号拾取会具有一种平均效应,能够有效地匀化由电极几何尺寸误差随机变化所引入的测量误差。采用制造精度在1μm级的微纳加工工艺和制造精度在10μm级的印制电路板(PCB)工艺分别制作了两套量程为200 mm的传感器样机,并进行了精度对比实验。实验结果表明,由于平均效应的作用,PCB工艺制作的样机经过简单的线性补偿后,在满量程内取得了±250 nm的测量精度,接近微纳加工工艺制作的样机的测量精度。实验结果验证了多个感应电极平均效应的有效性。In the manufacturing process of nanometer time-grating sensor,the manufacturing errors caused by the processing technology are mainly manifested as the electrode geometric errors.By using the method of sectional area integral to build the mathematical model,the influence of electrode geometric errors on the measurement accuracy is analyzed in detail.It is revealed that there is an averaging effect when the signal is picked up by multiple induction electrodes,which can effectively homogenize the measurement errors caused by the random variation of electrode geometric errors.Two prototype sensors with a range of 200 mm are fabricated by micro-nano-machining technology with a manufacturing accuracy of 1μm and printed circuit board(PCB)technology with a manufacturing accuracy of 10μm,respectively.Accuracy comparison experiment is carried out and experimental results show that,due to the averaging effect,the prototype made by PCB technology has achieved a measurement accuracy of±250 nm in the full range after simple linear compensation,which is close to the measurement accuracy of the prototype made by micro-nano-machining technology.Experimental results verify the effectiveness of the averaging effect of multiple induction electrodes.

关 键 词：制造误差 电极几何尺寸误差 平均效应 栅式位移传感器 纳米时栅 

分 类 号：TH7[机械工程—仪器科学与技术]