Curvy surface conformal ultra-thin transfer printed Sioptoelectronic penetrating microprobe arrays  

作　　者：Kyoseung Sim Zhoulyu Rao Yanbin Li Dong Yang Cunjiang Yu 

机构地区：[1]Materials Science and Engineering Program,University of Houston,Houston,TX 77204,USA [2]Department of Mechanical Engineering,University of Houston,Houston,TX 77204,USA [3]Department of Electrical and Computer Engineering,University of Houston,Houston,TX 77204,USA [4]Department of Biomedical Engineering,University of Houston,Houston,TX 77204,USA

出　　处：《npj Flexible Electronics》2018年第1期8-13,共6页npj-柔性电子（英文）

基　　金：This work is partially supported by NSF grants(1509763,1554499);the Startup Fund and Bill D.Cook Faculty Scholarship from the University of Houston.

摘　　要：Penetrating neural probe arrays are powerful bio-integrated devices for studying basic neuroscience and applied neurophysiology,underlying neurological disorders,and understanding and regulating animal and human behavior.This paper presents a penetrating microprobe array constructed in thin and flexible fashion,which can be seamlessly integrated with the soft curvy substances.The function of the microprobes is enabled by transfer printed ultra-thin Si optoelectronics.As a proof-of-concept device,microprobe array with Si photodetector arrays are demonstrated and their capability of mapping the photo intensity in space are illustrated.The design strategies of utilizing thin polyimide based microprobes and supporting substrate,and employing the heterogeneously integrated thin optoelectronics are keys to accomplish such a device.The experimental and theoretical investigations illustrate the materials,manufacturing,mechanical and optoelectronic aspects of the device.While this paper primarily focuses on the device platform development,the associated materials,manufacturing technologies,and device design strategy are applicable to more complex and multi-functionalities in penetrating probe array-based neural interfaces and can also find potential utilities in a wide range of bio-integrated systems.

关 键 词：optoelectronic ARRAYS TRANSFER 

分 类 号：TN3[电子电信—物理电子学]