白光干涉测量控制系统的集成化设计  

Integrated Design of the Control System for White Light Interferometry

作　　者：周勇 蔡潇雨[2] 魏佳斯[2] Zhou Yong;Cai Xiaoyu;Wei Jiasi(Shanghai Jice Information Technology Co.,Ltd.,Shanghai 200234,China;Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China)

机构地区：[1]上海计测信息科技有限公司,上海200234 [2]上海市计量测试技术研究院,上海201203

出　　处：《半导体技术》2021年第9期739-743,共5页Semiconductor Technology

基　　金：国家重点研发计划资助项目(2019YFB2004900);上海市市场监督管理局科研项目(2019-02);上海市科学技术委员会科研计划项目(19YF1441700)。

摘　　要：微纳技术的发展带动了微纳米检测计量仪器的发展,微纳米测量仪器的智能化、集成化和小型化是仪器研发中的共性问题。在白光干涉测量系统中,设计了基于STM32处理器的控制系统,该系统将原本分立的光源控制、相机控制和样品台控制等控制模块集成构建于一台控制器。针对白光干涉测量系统的控制需求设计开发了驱动电路、通信电路、光源控制电路和相机触发电路等。设计优化了信号同步、光源控制策略,从而提高了扫描同步性和测量稳定性。控制系统的集成化设计有效提高了光学三维轮廓仪的小型化和集成性,降低了仪器的制造和维护成本。The development of micro-nano technology has driven the development of micro-nano measurement instruments.The intellectualization, integration and miniaturization of micro-nano measurement instruments are common problems in the development of instrument.A control system for white light interferometry based on STM32 processor was designed.In this system, the original discrete control modules of light source control, camera control and sample stage control were integrated into a controller.According to the control requirements of the white light interferometry system, the driving circuit, communication circuit, light source control circuit and camera trigger circuit were designed and developed.The signal synchronization and light source control strategy were optimized, which improved the scanning synchronicity and measurement stability.The integrated design of the control system effectively improves the miniaturization and integration of the optical three-dimensional profilometer, and reduces the manufacturing and maintenance costs of the instrument.

关 键 词：白光干涉法 控制系统 集成化设计 STM32处理器 微纳测量 

分 类 号：TH741.1[机械工程—光学工程]