基于连续波腔衰荡光谱的CO_(2)气体分析装置研制  

Development of CO_(2) gas analyzer based on continuous wave cavity ring-down spectroscopy

作　　者：马维光[1,3] 周晓彬 曹振松 许非 田建飞 周月婷 刘建鑫 赵刚 MA Weiguang;ZHOU Xiaobin;CAO Zhensong;XU Fei;TIAN Jianfei;ZHOU Yueting;LIU Jianxin;ZHAO Gang(State Key Laboratory of Quantum Optics and Quantum Optics Devices,Institute of Laser Spectroscopy,Shanxi University,Taiyuan 030006,China;Key Laboratory of Atmospheric Optics,Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China)

机构地区：[1]山西大学激光光谱研究所量子光学与光量子器件国家重点实验室,山西太原030006 [2]中国科学院合肥物质科学研究院安徽光学精密机械研究所,中国科学院大气光学重点实验室,安徽合肥230031 [3]山西大学极端光学协同创新中心,山西太原030006

出　　处：《量子电子学报》2021年第5期633-640,共8页Chinese Journal of Quantum Electronics

基　　金：国家自然科学基金,61875107,61905136,61905134;中国科学院大气光学重点实验室开放课题基金,JJ-2018-02。

摘　　要：连续波腔衰荡光谱技术(CW-CRDS)可以实现对痕量气体的高灵敏检测。基于(CW-CRDS),采用近红外分布反馈式二极管激光器(DFB-DL)和半导体光放大器(SOA),使用自主设计的高精细度Fabry–Pérot腔、激光驱动器、阈值检测电路,实现了紧凑型气体分析装置的设计。其中SOA在放大激光功率、提升衰荡信号信噪比的同时,还作为光开关,用于触发衰荡事件。整个系统集成在一个700 mm×300 mm×185 mm的定制机箱中,基于该装置测量了位于6359.97 cm^(−1)处的CO_(2)气体,对空腔衰荡的时间序列分析结果显示系统的探测极限为3.85×10^(−8)cm^(−1)。Continuous wave cavity ring-down spectroscopy(CW-CRDS)can be utilized in high sensitive trace gas detection.Based on CW-CRDS,using near-infrared distributed feedback diode laser(DFB-DL),semiconductor optical amplifier(SOA),and self-designed high-finesse Fabry-P´erot cavity,laser driver and threshold detection circuit,the compact design of trace gas analyzer have been realized.In the system,SOA not only amplifies the laser power and improves the signal-to-noise ratio of ring-down signal,but also acts as an optical switch to trigger the ring-down time.The whole system is integrated in a 700 mm×300 mm×185 mm customized cabinet.Based on this device,CO_(2)gas is measured at 6359.97 cm^(−1),and the time series analysis results of the empty cavity ring-down time shows that the detection limit of the system is 3.85×10^(−8)cm^(−1).

关 键 词：光谱学 气体分析装置 腔衰荡光谱 CO_(2)气体检测 分布反馈式二极管激光器 

分 类 号：O433.1[机械工程—光学工程]