Fabrication and Performance Investigation of Karma Alloy Thin Film Strain Gauge  

作　　者：LEI Peng ZHANG Congchun PANG Yawen YANG Shengong ZHANG Meiju 雷鹏;张丛春;庞雅文;杨伸勇;张梅菊(National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai Jiao Tong University,Shanghai,200240,China;Department of Micro/Nano Electronics,School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai,200240,China;AVIC Beijing Changcheng Aeronautical Measurement and Control Technology Research Institute,Beijing,100022,China)

机构地区：[1]National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai Jiao Tong University,Shanghai,200240,China [2]Department of Micro/Nano Electronics,School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai,200240,China [3]AVIC Beijing Changcheng Aeronautical Measurement and Control Technology Research Institute,Beijing,100022,China

出　　处：《Journal of Shanghai Jiaotong university(Science)》2021年第4期454-462,共9页上海交通大学学报（英文版）

摘　　要：Karma alloy thin film strain gauges were fabricated on alumina substrates by magnetron sputtering. The electrical properties of strain gauges annealed at different temperatures were then tested. The surface morphology and phase structure of the Karma alloy thin films were analyzed using X-ray diffraction and scanning electron microscopy. The effect of the annealing temperature on the performance of the Karma alloy thin film strain gauge was also investigated. As the annealing temperature increased, it was found that the resistivity of the thin films decreased, whereas the temperature coefficient of resistance (TCR) of the thin films increased. A Karma alloy thin film strain gauge was annealed at 200 °C, thereby obtaining a gauge factor of 1.7 and a corresponding TCR of 64.8 × 10−6 K−1. The prepared Karma alloy thin film strain gauge had a lower TCR than other strain gauges at room temperature. This result can provide a reference for the preparation and application of Karma alloy thin film strain gauges in specific scenarios.

关 键 词：thin film strain gauge Karma alloy magnetron sputtering coefficient of resistance(TCR) gauge factor 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]