磁控溅射含铜CrN薄膜的结构和抗菌性能  

Structure and antibacterial properties of magnetron sputtered Cu-containing CrN films

作　　者：王应杰 侯粤峰 王丽君[1] 沈步云 付涛[1] WANG Yingjie;HOU Yuefeng;WANG Lijun;SHUM Po-Wan;FU Tao(Key Laboratory of Biomedical Information Engineering of Ministry of Education,School of Life Science and Technology,Xi'an Jiaotong University,Xi'an 710049,China;Guangdong Cenfly Medical Technology Co.Ltd,Jiangmen 529200,China;Asahi Group Co.Ltd,Kwun Tong,Hong Kong 999077,China)

机构地区：[1]西安交通大学生命科学与技术学院生物医学信息工程教育部重点实验室,西安710049 [2]广东诚辉医疗科技股份有限公司,江门529200 [3]朝日集团有限公司,香港999077

出　　处：《生物医学工程研究》2021年第3期281-286,共6页Journal Of Biomedical Engineering Research

基　　金：陕西省自然科学基础研究计划项目(2021JM-036);广东诚辉医疗科技股份有限公司科技特派员工作站项目(2018240100180010683);广东省高效医疗器械产品工程技术研究中心项目(2018110100310005409)。

摘　　要：本研究采用反应磁控溅射技术制备了不同铜含量的CrNCu抗菌薄膜。台阶轮廓仪、扫描电镜、电子能谱和X射线衍射分析表明,随着铜靶电流的增大,薄膜的沉积速率和Cu含量升高,CrN和Cr含量下降,但粗糙度在0.9~1.4 nm之间。接触角测试表明CrNCu薄膜具有高疏水性和低表面能,其表面水滴的干燥时间长于玻璃试样。平板计数和模拟环境下的喷雾菌液实验表明,CrNCu薄膜对大肠杆菌具有良好的抗菌性能。We prepared CrNCu antibacterial films with different copper content by reactive magnetron sputtering.Profilometer,SEM,EDX and XRD analyses showed that the deposition rate and Cu content increased,CrN and Cr contents decreased with the copper target current,but the film roughness was kept at 0.9~1.4 nm.Contact angle measurement showed that CrNCu films had high hydrophobicity and low surface energy,and the drying time of water droplet at the film surface was longer than that of glass sample.The tests of plate counting and spraying of bacterial suspension indicate that the CrNCu films have good antibacterial activity against E.coli.

关 键 词：气相沉积薄膜 公共设施抗菌 铜抗菌剂 润湿性 液滴干燥动力学 抗菌实验方法 

分 类 号：R318.08[医药卫生—生物医学工程] TG146.1[医药卫生—基础医学]