纳米尖阵列屏蔽效应与发射面积耦合机理仿真  

Simulation of coupling mechanism between shielding effect and emission area of nano tip array

作　　者：张晶园 刘昌祎[1] 黄向东 张妮[1] 李菁波 张涛 ZHANG Jingyuan;LIU Changyi;HUANG Xiangdong;ZHANG Ni;LI Jingbo;ZHANG Tao(College of Electrical and Control Engineering,Xi’an University of Science and Technology,Xi’an 710054,China;Postdoctoral Mobile Station of Mechanical Engineering,Xi’an University of Science and Technology,Xi’an 710054,China;College of Sciences,Xi’an University of Science and Technology,Xi’an 710054,China)

机构地区：[1]西安科技大学电气与控制工程学院,陕西西安710054 [2]西安科技大学机械工程博士后流动站,陕西西安710054 [3]西安科技大学理学院,陕西西安710054

出　　处：《西安科技大学学报》2021年第5期912-920,共9页Journal of Xi’an University of Science and Technology

基　　金：国家自然科学基金项目(51777167,11974275);中国博士后科学基金项目(2018M643811XB);陕西省科技创新团队计划(2019TD-026);陕西省教育厅自然科学基金项目(19JK0529)。

摘　　要：基于纳米尖阵列的场致发射放电结构是微纳电离式器件的核心,能有效降低放电电压,但同时也决定该放电结构的放电电流较小难以被精确感知。对纳米尖阵列电极的电场屏蔽效应和有效发射面积的优化,是提高放电强度的有效方法,对此,利用有限元方法对N_(2)-O_(2)空间的动态电场进行数值模拟,对纳米尖阵列在不同间距下的放电过程进行仿真计算。计算发现:在纳米尖阵列中,随着纳米尖间距的增加,尖端间的屏蔽效应逐渐减弱,最终趋于各尖端独立放电的情况;并通过不同间距下尖端动态放电过程中的电子密度分布情况,对屏蔽效应进行进一步验证和说明;最后,通过探究屏蔽效应与发射面积间耦合关系对放电电流的影响,发现在纳米尖阵列中,尖端间距与尖端高度之间存在最佳比例,使纳米尖阵列的放电电流最大。研究揭示常压微电晕放电阵列电极屏蔽效应与发射面积的耦合机理,可用于调控微纳场致发射电离器件的放电效应,进而为此类器件输出性能优化提供一定的理论指导。The field emission discharge structure based on nano tip array is the core of micro nano ionization devices,which can effectively reduce the discharge voltage,resulting in a small discharge current of the discharge structure,difficult to be accurately perceived.The optimization of electric field shielding effect and effective emission area of nano tip array electrode is an efficient method to improve the discharge intensity.In this paper,the finite element method is used to simulate the dynamic electric field in N_(2)-O_(2) space,and the discharge process of nano tip array under different spacing is simulated.It is found that the shielding effect between the tips decreases with the increase of the distance between the tips,and finally tends to discharge independently.The shielding effect is further verified and explained by the electron density distribution in the process of dynamic discharge at different distances.And by exploring the influence of the coupling relationship between the shielding effect and the emission area on the discharge current,it is found that there is an optimal ratio between the tip spacing and the tip height in the nano tip array,which makes the discharge current of the nano tip array maximum.The study reveals the coupling mechanism between the shielding effect and the emission area of the atmospheric pressure micro corona discharge array electrode,which can be used to control the discharge effect of the micro nano field emission ionization device.The research provides a theoretical guidance for the optimization of the output characteristics of the device.

关 键 词：电晕放电 动态放电过程 屏蔽效应 发射面积 N 2-O 2空间 

分 类 号：TM152[电气工程—电工理论与新技术]