基于MWCNT-PDMS高灵敏度电容式柔性压力传感器  

High Sensitivity Capacitive Flexible Pressure Sensor Based on MWCNTs-PDMS

作　　者：徐国际 张文磊 李廷鱼 顼建乐 郭丽芳 李刚 Xu Guoji;Zhang Wenlei;Li Tingyu;Xu Jianle;Guo Lifang;Li Gang(Center for Nanoenergy and Devices,College of Information and Com puter,Taiyuan University of Technology,Taiyuan 030024,China)

机构地区：[1]太原理工大学信息与计算机学院纳米能源与器件中心,太原030024

出　　处：《微纳电子技术》2021年第10期920-925,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(U1810204,61901293,22002083,21905099);山西省自然科学基金资助项目(201901D111099,201901D211074);山西省高校科技创新研究项目(2016138)。

摘　　要：作为柔性电子器件的重要分支,高灵敏度柔性压力传感器已成为当前研究热点。选取聚二甲基硅氧烷(PDMS)作为柔性介质薄膜和氧化铟锡-聚对苯二甲酸乙二醇酯(ITO-PET)作为柔性电极构建三明治结构电容式柔性压力传感器,通过在PDMS薄膜内掺杂高导电性多壁碳纳米管(MWCNT)形成微电容提升传感器灵敏度。同时,测试高低温工作稳定性、响应时间、循环稳定性和迟滞特性等关键传感特性。测试结果表明:经过优化MWCNT掺杂质量分数,在低压范围内传感器灵敏度可从初始的0.52 kPa^(-1)增加到1.512 kPa^(-1),灵敏度提升接近2倍。同时,MWCNT掺杂传感器还表现出工作温度范围宽(-18~80℃)、响应时间短(65 ms)、循环稳定性高、迟滞误差小等优异的传感特性。最后针对较高压力下的漏电现象进行了适当分析。As an important branch of flexible electronic devices,a flexible pressure sensor with high sensitivity has become a research hotspot.Polydimethylsiloxane(PDMS)as a flexible dielectric film and indium tin oxide coated polyethylene terephthalate(ITO-PET)as a flexible electrode were selected to construct a sandwich structure capacitive flexible pressure sensor.By doping highly conductive multiwalled carbon nanotubes(MWCNTs)into the PDMS film,micro-capacitors were introduced to improve the sensitivity of the sensor.And the high and low tempe-rature working stability,response time,cycling stability,hysteresis characteristics and other key sensing characteristics were tested.The test results show that by optimizing the doping mass fraction of MWCNTs,the sensitivity of the sensor increases from 0.52 kPa^(-1)to 1.512 kPa^(-1)in the low pressure range and the sensitivity can be improved by nearly two times.At the same time,the MWCNTs doped sensor also shows excellent sensing characteristics,such as wide operating temperature range(-18-80℃),short response time(65 ms),high cycling stability and small hysteresis error.Finally,the leakage phenomenon under high pressure was properly analyzed.

关 键 词：电容式柔性压力传感器 多壁碳纳米管(MWCNT) 柔性电子器件 柔性介质薄膜 柔性电极 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TB34[自动化与计算机技术—控制科学与工程]