非蒸散型吸气材料研究现状及进展  

Research status and progress of non-evaporable getter for electronic vacuum devices

作　　者：宋伊 冯焱[1] 成永军[1] 裴晓强[1] 冯天佑[1] 郭美如[1] 董猛[1] 魏宁斐 SONG Yi;FENG Yan;CHENG Yong-jun;PEI Xiao-qiang;FENG Tian-you;GUO Mei-ru;DONG Meng;WEI Ning-fei(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《中国有色金属学报》2021年第8期2160-2170,共11页The Chinese Journal of Nonferrous Metals

摘　　要：阐述了非蒸散型吸气材料的工作机理,从压制型、多孔烧结型和薄膜型三大类介绍了非蒸散型吸气材料的发展历程,并对各类吸气材料存在的问题进行了分析,压制型合金的机械强度较低、多孔烧结型合金的激活温度较高以及薄膜型合金的吸气容量较低。然后对非蒸散型吸气材料的改性研究进行了概述,改性方法主要有合金化法、表面镀层法以及活性表面最大化法。最后,对非蒸散型吸气材料的研究趋势进行了展望,并指出非蒸散型吸气材料仍需解决的问题。Non-evaporable getter extracts active gases to obtain and maintain high vacuum degree after sealing off the electric-vacuum devices,so its gettering characteristics directly affect the performance of devices even determine whether the device can work properly.First,the mechanism of non-evaporable getter was briefly introduced,and the latest advance in non-evaporable getter,comprising powder-pressed,porous sintered and film types,was reviewed.Besides,problems with various getters were analyzed,it is found that the mechanical strength of powder-pressed alloy is low,the activation temperature of porous sintered alloy is high,and the absorption capacity of film alloy is low.Then,modification techniques of non-evaporable getter,including alloying,surface coating and active surface maximization method,were summarized.Finally,the development trends and the unresolved technical problems of non-evaporable getter materials were pointed out as well,in a thought provoking way.

关 键 词：非蒸散型吸气材料 工作机理 激活温度 吸气性能 

分 类 号：TB741[一般工业技术—材料科学与工程]