基于光锥结构的红外厚度传感器研究  

Research on infrared thickness sensor based on optical cone strucrure

作　　者：郇帅[1] 莫长涛[1] 文晶姬 吕加[1] 王明[1] 李楠[1] HUAN Shuai;MO Chang-tao;WEN Jing-ji;LYU Jia;WANG Ming;LI Nan(College of Basic Science,Harbin University of Commerce,Harbin 150028,China)

机构地区：[1]哈尔滨商业大学基础科学学院,哈尔滨150028

出　　处：《哈尔滨商业大学学报（自然科学版）》2021年第5期595-600,共6页Journal of Harbin University of Commerce：Natural Sciences Edition

基　　金：黑龙江省自然科学基金项目(No.A2015019).

摘　　要：提出一种基于光锥结构的红外厚度传感器,用于样品厚度的检测.给出输出功率与样品厚度、供电电流及供电频率的理论模型,采用生物地理学优化算法对参数进行多参量系统优化,找出最佳参量条件,与实验数据获得的最佳参量基本吻合.根据面型设计理论及高、低折射率交替镀膜技术制作顶角为20°、长45 mm、内表面反射率高达99%的光锥,实现了红外厚度检测中光线的聚集与准直,提高了光电探测器单位面积上接收的光能量,减少了在传统红外厚度检测中光学镜片结构复杂且成本高的不足.结果表明,实验结果与该模型边界条件基本吻合,通过高、低折射率交替镀膜技术实现了一次曲面光锥内表面反射率达99.45%,防止基底缓慢氧化引起的反射率衰减从而影响测量精度.A kind of infrared thickness sensor based on light-cone structure was proposed,which was used to detect the thickness of the sample.The theoretical models of output power and sample thickness,power supply current and power supply frequency were given.Biogeography optimization algorithm was used to optimize the parameters of multi-parameter system,and found out the best parameter condition,which was basically consistent with the best parameters obtained from the experimental data.According to the plane design theory and alternating high and low refractive index coating technology production angle for 20 degrees,45 mm long,light cone surface reflectivity as high as 99%,the aggregation and collimated light infrared thickness detection,improved the photoelectric detector received light energy per unit area,reducing the shortcomings in traditional infrared detection the thickness of the optical lens with complicated structure and high cost.The results showed that the experimental results were basically consistent with the boundary conditions of the model.The high and low refractive index alternate coating technology has achieved the inner surface reflectivity of the conical surface cone up to 99.45%,preventing the attenuation of reflectance caused by slow oxidation of the substrate and affecting the measurement accuracy.

关 键 词：红外 厚度传感器 模型 生物地理学 光锥 镀膜 

分 类 号：O57[理学—粒子物理与原子核物理]