静态ISO 6级乱流电子洁净室气流组织数值模拟  

Numerical simulation of airflow in static ISO Class 6 turbulence electronic cleanroom

作　　者：赵福云[1] 杨国彪 王云鹤 汪维伟 ZHAO Fuyun;YANG Guobiao;WANG Yunhe;WANG Weiwei(School of Power and Mechanical Engineering,Wuhan University,Wuhan 430072,China)

机构地区：[1]武汉大学动力与机械学院,湖北武汉430072

出　　处：《武汉大学学报（工学版）》2021年第9期810-819,共10页Engineering Journal of Wuhan University

基　　金：国家重点研发计划项目(编号:2018YFC0705201、2018YFC0705201-1)。

摘　　要：对ISO(International Organization for Standardization) 6级上送侧回模式的乱流电子洁净室进行了数值模拟,运用计算流体力学方法探讨了送风量大小、送风口个数以及位置、工作台与送风口正对方式等因素对电子洁净室内空气环境的影响。结果表明:送风口正对工作台布置可以抑制工作台上方的热羽流,设备之间布置送风口可以抑制工作台之间的热羽流;送风口与工作台平行正对布置形式下气流组织优于送风口与工作台正交正对的布置形式;送风口集中布置在设备附近,并保证送风口的风速,有助于保障电子洁净室主流区域的气流单向性。数值模拟结果可为乱流电子洁净室的送风口布置提供可行性的建议。An up-feed and side-return mode electronic cleanroom of ISO(International Organization for Standardization) Class 6 with turbulence airflow inside is investigated numerically in this paper. By means of the method of computational fluid dynamics, the influence of some important factors on the air environment in the electronic cleanroom is discussed, such as the ventilation rate, the number and the position of air supply outlets,the space position relation between the workstation and air supply outlets. The numerical results show that when the air supply outlets are arranged directly opposite to the workstation, the thermal plume above the worktable can be restrained;when the air supply outlets are arranged between the devices, the thermal plume between the devices can be inhibited. When the air supply outlets are arranged in parallel and directly opposite to the worktable, the airflow is better than that of the air supply outlets orthogonal and directly opposite to the worktable. It helps to ensure the unidirectional airflow in the mainstream area of the cleanroom if the air supply outlets are centrally arranged near the worktable, and the wind speed of the air supply outlets is ensured. The numerical simulation results in this paper put forward feasible suggestions for the layout of the air supply outlets in the turbulent electronic cleanrooms.

关 键 词：电子洁净室 气流组织 工作台 送风口 计算流体力学 

分 类 号：TU834.2[建筑科学—供热、供燃气、通风及空调工程]