水基溶胶-凝胶沉积法制备YBCO薄膜  

Preparation of YBCO Films by Water-BasedSol-Gel Deposition

作　　者：何东 徐文博 胡文鹏 程大伟 童靓 HE Dong;XU Wenbo;HU Wenpeng;CHENG Dawei;TONG Liang(China Electronic Product Reliability and Environmental Testing Research Institute,Wuhu Division,Wuhu 241002,China;China Electronic Product Reliability and Environmental Testing Research Institute,Hefei Division,Hefei 230088,China;The Fifth Electronic Research Institute of MIIT,Guangzhou 511370,China)

机构地区：[1]芜湖赛宝信息产业技术研究院有限公司,芜湖241002 [2]安徽赛宝工业技术研究院有限公司,合肥230088 [3]工业和信息化部电子第五研究所,广州511370

出　　处：《人工晶体学报》2021年第9期1688-1693,共6页Journal of Synthetic Crystals

摘　　要：本文研究了退火温度对用水基溶胶-凝胶工艺在LaAlO3(100)单晶衬底上沉积的YBCO薄膜性能的影响。研究发现,随着温度的升高,薄膜的面内取向得到了优化,而薄膜的面外取向则不然。在789℃退火的YBCO薄膜在77 K和0 T条件下的临界电流密度Jc达到了1.7 MA/cm^(2)。而其他温度退火的薄膜的缺陷可能会导致YBCO超导电性变差。然而,这些薄膜中存在的残余应力应变也有助于增强其钉扎力并改善薄膜外加场下的电性能。The effects of annealing temperature on properties of YBCO films deposited on(100)LaAlO3 single crystal substrates derived from a water-based sol-gel process were investigated.In this paper,the in-plane texture is improved at higher temperatures but the out-of-plane texture follows an opposite trend.YBCO films annealed at 789℃with homogeneous and smooth surface as well as Jc=1.7 MA/cm^(2) at 77 K and 0 T was obtained.Particles and holes observed on the other films could result in bad connections between superconducting grains and decrease the superconducting current in the films.Strain in these films is likely to enhance the pinning force and improve the transport properties under applied field.

关 键 词：水基溶胶-凝胶 退火温度 YBCO 临界电流密度 缺陷 超导性 

分 类 号：TB383.2[一般工业技术—材料科学与工程]