带热障涂层高温合金材料飞秒激光制孔工艺试验研究  

Experimental research on femtosecond laser hole making process of superalloy material with thermal barrier

作　　者：温嵘 朱文宇[2] 麻丁龙 马国庆 WEN Rong;ZHU Wen-yu;MA Ding-long;MA Guo-qing(China Hangfa Xi'an Aero Engine Co.,Ltd.,Xi'an 710100,China;Xi'an Institute of Optics and Precision Machinery,CAS,Xi'an 710119,China;Xi'an Micromach Technology Co.,Ltd.,Xi'an 710119,China;School of Mechatronic Engineering,Xi'an Technological University,Xi'an 710021,China)

机构地区：[1]中国航发西安航空发动机有限公司,陕西西安710100 [2]中国科学院西安光学精密机械研究所,陕西西安710119 [3]西安中科微精光子制造科技有限公司,陕西西安710119 [4]西安工业大学机电工程学院,陕西西安710021

出　　处：《激光与红外》2021年第9期1155-1159,共5页Laser & Infrared

摘　　要：随着带热障涂层高温合金的广泛应用,对飞秒激光制孔的工艺也提出了更高的挑战,本文通过研究飞秒激光与氧化锆陶瓷的相互作用原理,计算出了当单脉冲能量约为80μJ时,焦点内的材料可以被完全去除,并通过实验进行了验证。通过大量的优化实验,提出了针对带涂层高温合金的分段制孔法,总结出了最优的工艺参数,可用于任意角度制孔,所获得的微孔涂层表面质量完好,过渡段无裂纹,孔壁质量良好。With the wide application of superalloys with thermal barrier coatings,the process of femtosecond laser hole making has also faced higher challenges.In this paper,by studying the interaction principle of femtosecond laser and zirconia ceramics,the current when the energy of a single pulse is about 80μJ,the material in the focal point can be completely removed,which is verified by experiments.Through a large number of optimization experiments,a segmented hole making method for coated superalloys is proposed,and the optimal process parameters are summarized,which can be used to make holes at any angle.The surface quality of the obtained microporous coating is intact and the transition section cracks and has no hole wall quality is good.

关 键 词：热障涂层 飞秒激光 微孔加工 

分 类 号：TN249[电子电信—物理电子学]