硅基MEMS安全系统参数化仿真方法研究  

Parametric simulation method of silicon-based MEMS safety and arming device

作　　者：畅玉洁[1] 涂宏茂[2] CHANG Yujie;TU Hongmao(Jinzhong Vocational and Technical College,Jinzhong 030600,China;Chinese Academy of Ordnance Sciences,Beijing 100089,China)

机构地区：[1]晋中职业技术学院,山西晋中030600 [2]中国兵器科学研究院,北京100089

出　　处：《兵器材料科学与工程》2021年第5期64-70,共7页Ordnance Material Science and Engineering

基　　金：国家国防科工局资助项目(Z092014B001)。

摘　　要：针对传统MEMS安全系统不具备通用化应用设计的问题,基于一体化设计思想,提出一种硅基MEMS安全系统。编写Matlab程序对阈值判定机构可靠解保的临界g值进行研究,并对边界进行分析,得到阈值判定机构连接节点的参数化设计方法。结果表明:当离心加速度超过52 320g时,阈值判定机构能可靠解除保险,且参数化连接节点临界断裂g值的理论结果和仿真结果吻合度较高,误差均小于10%。本文的参数化研究方法可为MEMS引信的快速及通用化设计提供思路。Aiming at the problems that traditional MEMS safety and arming(S & A)device does not have universal application design,a silicon-based MEMS S & A device based on the concept of integrated design was proposed. The critical g value of the threshold-value judging mechanism was studied by Matlab program,the boundary verification was analysed,and the parameterized design method of the connection node of the threshold-value judging mechanism was obtained. The results show that,when the centrifugal acceleration exceeds 52 320 g,the threshold-value judging mechanism can reliably release the insurance,and the theoretical and simulation results of the critical fracture g value of the parameterized connection node have a high degree of agreement,the error is less than 10%. The parametric research method in this paper can provide an idea for the rapid and universal design of MEMS fuze.

关 键 词：MEMS安全系统 参数化设计 仿真分析 

分 类 号：TB114.3[理学—概率论与数理统计]