X射线超反射镜鲁棒性膜系设计  

Robust Design of Multilayer for X-ray Super-mirrors

作　　者：陶保全 郭祥帅 李博涵 匡尚奇[1] 李超逸 TAO Bao-quan;GUO Xiang-shuai;LI Bo-han;KUANG Shang-qi;LI Chao-yi(School of Science,Changchun University of Science and Technology,Changchun 130022)

机构地区：[1]长春理工大学理学院,长春130022

出　　处：《长春理工大学学报（自然科学版）》2021年第5期6-11,共6页Journal of Changchun University of Science and Technology(Natural Science Edition)

基　　金：国家自然科学基金项目(61405189,61974142);吉林省科技发展计划项目(20190201013JC)。

摘　　要：为降低X射线超反射镜镀膜误差导致的光谱性能退化、提高其可制备性,提出了基于多目标遗传算法的X射线超反射镜鲁棒性设计方法,将X射线超反射镜的反射带性能和膜厚随机误差引起的反射带偏差作为两个优化目标进行优化。考虑到X射线光学系统掠入射反射的特殊性,在优化求解的计算过程中加入了入射光发散角对多层膜反射率的影响,进而分别设计了具有掠入射角度带宽和能量带宽的两种X射线多层膜反射镜鲁棒性膜系。结果表明,相比只优化光学性能的传统优化设计方法,鲁棒性设计方法能够得到反射性能良好且对膜厚随机误差不敏感的超反射镜膜系设计。In order to reduce the spectral performance degradation caused by the random layer thickness errors of multilayer and improve the manufacturability of the X-ray super-mirror,a robust design method based on multi-objective genetic algorithm was supplied.The reflectivity of X-ray super-mirror and the reflectivity deviation caused by film thickness random error are used as two optimization targets.Considering the particularity of grazing incident reflection in X-ray optical system,the influence of incident light divergence angle on the reflectivity of multilayer was added into the calculation process of optimization;and then two kinds of robust X-ray multilayer mirrors with grazing incident angle bandwidth and energy bandwidth were designed respectively.The results show that being compared with the conventional optimization design method which only optimizes the optical performance,the multi-objective robust design method can obtain the design of the multilayer system with good reflection performance and less sensitivity to the random film thickness error.

关 键 词：多层膜设计 X射线超反射镜 鲁棒性设计 发散角 

分 类 号：O434[机械工程—光学工程]