超快激光制备金属表面可控微纳二级结构及其功能化  

Ultrafast Laser Fabricating of Controllable Micro-Nano Dual-Scale Metallic Surface Structures and Their Functionalization

作　　者：罗晓 刘伟建 张红军 钟敏霖 Luo Xiao;Liu Weijian;Zhang Hongjun;Zhong Minlin(Laser Materials Processing Research Center,School of Materials Science and Engineering,Tsinghua University,Beijing 100084,China)

机构地区：[1]清华大学材料学院激光材料加工研究中心,北京100084

出　　处：《中国激光》2021年第15期140-163,共24页Chinese Journal of Lasers

基　　金：国家重点研发计划(2017YFB1104300);国家自然科学基金(51575309,51210009,51905303);清华大学自主科研计划(2018Z05JZY009)。

摘　　要：自然界中存在大量具有特殊微纳结构的多尺度表面,如荷叶、水稻叶、玫瑰花瓣、壁虎脚趾、鲨鱼皮、蝴蝶翅膀、昆虫复眼等,这些表面具有超疏水、超亲水、结构色、高敏感性、生物相容性等多种神奇功能。如何人工制备出仿生微纳米结构,从而实现师法自然和超越自然的目标,是材料与制造领域的重大课题之一。超快激光加工是灵活制备微纳米结构的可靠手段,但衍射极限制约了其纳米结构制备能力,且制备效率低下。本团队在过去的10多年中,在拓展超快激光微米与纳米结构制备能力以及仿生微纳结构的功能化方面开展了系统研究,发展了一系列超快激光微纳结构制备与双级精确调控新方法,探索了超快激光制备的微纳结构表面在超疏水、高抗反射、高敏感性和生物医学检测等领域的创新应用。超快激光制备形态多样的微纳米结构并实现仿生功能化是一个富有吸引力的研究方向,但仍然面临着诸如突破衍射极限以实现1~100 nm典型纳米结构的制备、功能化微纳结构的设计与制备以及大面积微纳结构的高效制备等挑战。本文为《清华大学建校110周年之光耀清华》专辑而撰写,旨在总结过去、面向未来,与本领域同仁一起交流探讨,共同推进本研究领域的发展。Significance Numerous multi-scale surfaces are available in nature with special micro-nano structures,such as lotus leaves,rice leaves,rose petals,gecko toes,shark skin,butterfly wings,and insect compound eyes.Scientists confirm that,among these multi-scale structures,the micro-scale structures function to strengthen the mechanical stability for protecting the nanostructures,while the nanoscale structures exhibit 13 magical functions,including superhydrophobicity,superhydrophilicity,directional wetting,self-cleaning,drag reduction,reversible adhesion,directional adhesion,anti-reflection,structural color,high sensitivity,selective filtration,cyto-biocompatibility,and the regulation of cell behaviors.How to artificially fabricate these bionic multi-scale structures to achieve the goal of imitating and surpassing nature is a major topic in the fields of materials and manufacturing.An ultrafast laser is a pulsed laser with a pulse duration ranging from tens of femtoseconds to 10 picoseconds.Owing to its extremely short pulse duration,ultrafast lasers have high instantaneous energy density and high pulse repetition frequency.This enables its photon energy to interact directly with the internal lattice and electronic structures of materials in a considerably short time(the magnitude of pulse width)through various phase transformation mechanisms,such as phase and Coulomb explosions.Therefore,ultrafast lasers can process materials rapidly and accurately.These lasers can significantly reduce the heat-affected zone in the ablated area and then achieve extremely high accuracy and resolution.Thus,such a laser is a reliable tool for fabricating various micro-nano structures with high flexibility.However,owing to the diffraction limit,its fabrication capability for nanostructures is far more restricted,along with its lower fabrication efficiency.Progress For the past decade,the Laser Materials Processing Research Center,Tsinghua University,has been equipped with a new generation of high-power ultrafast lasers(apulse duration o

关 键 词：激光技术 微纳米结构 特殊浸润性表面 抗反射表面 水分解制氢电极 表面增强拉曼散射 

分 类 号：O436[机械工程—光学工程]