基于集成光束分配芯片的空间叠层衍射成像  

Ptychography Based on Integrated Beam Steering Chip

作　　者：杜振民 胡成洋 符庭钊 陈明华[1,2] 杨四刚 陈宏伟[1,2] Du Zhenmin;Hu Chengyang;Fu Tingzhao;Chen Minghua;Yang Sigang;Chen Hongwei(Department of Electronic Engineering,Tsinghua University,Beijing 100084,China;Beijing National Research Center for Information Science and Technology(BNRist),Beijing 100084,China)

机构地区：[1]清华大学电子工程系,北京100084 [2]北京信息科学与技术国家研究中心,北京100084

出　　处：《中国激光》2021年第15期430-437,共8页Chinese Journal of Lasers

基　　金：国家自然科学基金(61771284);清华大学国强研究院项目(2020GQG1010)。

摘　　要：空间叠层衍射成像是一种基于相干光的无透镜成像方式,因此可以避免透镜系统孔径有限带来的衍射极限问题。目前,空间叠层衍射成像方案多采用机械结构对光探针进行平移,这种方式会使光探针的位置产生偏移误差,导致成像质量的下降。为解决这一问题,利用硅基光子集成技术设计并制作了基于滤波器件的光束空间分配芯片,该芯片上共有16个发射天线,相当于16个光探针,光探针阵列以一定的交叠率照射物体,其衍射图样强度被红外相机的不同感光区域记录。该芯片可以替代传统的机械式光探针来实现空间叠层衍射成像。百纳米级的加工工艺降低了光探针位置的偏移误差,提高了成像的质量和系统的稳定性。同时,由于集成芯片的尺寸仅有毫米级别,故成像系统的尺寸也可相应地减小。Objective Imaging is the most intuitive way to perceive the world.The resolution of traditional imaging method is limited by the diffraction limit caused by the limited aperture of lens system.Ptychography is a non-lens imaging method based on coherent light,which avoids the diffraction limit problem caused by lens system.At present,the mechanical structure is often used to translate the optical probe in Ptychography,which brings errors of the position of the optical probe,resulting in the degradation of the imaging quality.Thus in this paper,we proposed a beam steering chip to avoid the errors of the position of the optical probe.The chip can replace the traditional mechanical optical probe to be used in ptychography.The 100 nanometer processing technology ensures that the position of the optical probe will not have errors,which greatly improves the quality of imaging and the stability of the system.On the other hand,because the size of the chip is only millimeter level,the size of the imaging system is also greatly reduced.Methods The silicon-based integrated beam steering chip is processed on a 220 nm silicon on insulator(SOI)platform.The main structure of the chip is cascaded optical transmitting antennas with a filter system.The CMOS process with a linewidth of 180 nm is used to ensure that the position error of the optical probe caused by the actual processing process will not exceed one ten thousandth of the distance between adjacent optical transmitting antennas.Therefore,the position error of optical probe can almost be ignored.Light with different wavelengths will be sent to its corresponding optical transmitting antenna.The transverse spacing between adjacent optical transmitting antennas is 120μm while the longitudinal spacing is 150μm.After collimated by the lens,the light emitted from each light transmitting antenna can act as a light probe.Because the corresponding wavelength of each optical probe is different,we can adjust the wavelength to decide which optical probe to scan.At the same time,bec

关 键 词：成像系统 相干成像 光子集成 红外成像 

分 类 号：O436[机械工程—光学工程]