CrN基复合薄膜研究进展  

Research Progress of CrN-based Composite Films

作　　者：关晓艳 赵美艳 史镐荣 王志新[1] 张留学[1] GUAN Xiao-yan;ZHAO Mei-yan;SHI Hao-rong;WANG Zhi-xin;ZHANG Liu-xue(School of Materials and Chemical Engineering,Zhongyuan University of Technology,Zhengzhou 450007,China)

机构地区：[1]中原工学院材料与化工学院,郑州450007

出　　处：《表面技术》2021年第10期80-93,共14页Surface Technology

基　　金：国家自然科学基金项目(51805557);河南省高等学校重点科研项目(19A430030);中原工学院青年人才创新能力基金项目(K2018QN017)。

摘　　要：主要综述了Cr N基多元复合薄膜、多层薄膜及多元多层复合薄膜的研究进展,详细叙述了多元复合、多层结构设计及多元多层复合设计对薄膜力学性能、摩擦学性能和耐腐蚀性能的影响,并重点阐述了薄膜的腐蚀机理及其耐磨损机制。指出了多元复合、多层结构设计和多元多层复合设计,均可一定程度上提高Cr N薄膜的力学性能、耐磨损性能和耐腐蚀性能。一般而言,多元多层设计可通过非晶/纳米晶微观结构调控、晶粒细化、界面强化、提高致密度、降低内应力等,使复合薄膜呈现出优异的耐腐蚀和耐磨损性能。最后对CrN基复合薄膜的发展及应用前景进行了展望,表明CrN基复合薄膜将继续朝着多元多层复合化、纳米多层化及超晶格等方向发展,其制备技术也更加多元复合化。随着Cr N基复合薄膜综合性能的不断提高,其应用领域也将更加广泛。In this paper,the research status of CrN-based multiple composite films,CrN-based multilayer films and CrNbased multiple multi-layer composite films were mainly illustrated.The effects of multiple composite design,multi-layer structure design and multiple multi-layer composite design on the mechanical properties,tribological properties and corrosion resistances of the films were elaborated.The corrosion mechanisms and wear resistance mechanisms of the films were emphatically introduced.It is clear that the mechanical properties,wear resistance and corrosion resistance of CrN films can improve by multiple composite design,multi-layer structure design and multiple multi-layer composite design.In general,the multiple multi-layer design can improve the composite films’excellent wear resistance and corrosion resistance by controlling the microstructure of amorphous/nanocrystalline,grain refinement,interface strengthening,increasing density and reducing internal stress.At last,the development and application prospects of CrN-based composite films were prospected.It is indicated that CrN-based composite films will continue to develop toward multiple multi-layer composite films,nano-multilayer structures and superlattice structures,and the preparation technology will also become more diversified and complex.With the continuous improvement of comprehensive properties of CrN-based composite films,the application fields will become more extensive.

关 键 词：CrN基复合薄膜 摩擦学性能 耐腐蚀性能 多元复合 多层结构 多元多层复合 

分 类 号：TG174.4[金属学及工艺—金属表面处理]