532nm绿激光参数对混合集成电路(HIC)金属封装外壳标识形貌的影响分析研究  

Effect of 532nm Green Laser Parameters on Surface Morphology of Hybrid Integrated Circuits Metal Package Marking

作　　者：唐国强 张小龙 孙玉玲 TANG Guo-qiang;ZHANG Xiao-long;SUN Yu-ling(No.43 Research Institute of CETC,Hefei 230088,China)

机构地区：[1]中国电子科技集团第43研究所,合肥230088

出　　处：《混合微电子技术》2020年第3期69-75,共7页Hybrid Microelectronics Technology

摘　　要：532nm绿激光常被用于混合集成电路(HIC)金属封装外壳标识的制作。本文探索了532nm绿激光的标刻速度、频率、Q脉冲宽度、开光延时、关光延时、拐角延时等参数对混合集成电路(HIC)金属封装外壳标识形貌的影响,并系统分析了相关原因。标刻速度、频率、Q脉冲宽度主要影响标识图案的整体形貌:标刻速度越快,标刻形貌清晰度越低;频率越低,Q脉冲宽度越窄,表面镀层材料越容易被打穿。开光延时、关光延时、拐角延时主要影响标刻图案的局部形貌细节:开光延时过大,会导致标识图案起始段缺失;关光延时过大,会导致标识图案结束段标刻深度变大,严重时表面镀层有可能被打穿;拐角延时设置过大时,标识图案拐角处镀层容易被打穿。本文给出了一种根据标识形貌来优化532nm绿激光参数的思路,以期提高不同批次、不同镀层金属外壳标识质量的稳定性与一致性。Green laser is usually used to make markings on the surface of hybrid integrated circuits metal package.In this paper,the effect of six green laser parameters such as laser marking speed,laser frequency,Q-switch pulse width,light—on delay,light-off delay and turning delay on surface morphology of marking is studied.Laser marking speed,laser frequency and Q-switching pulse width determined the apparent morphology of marking.As the marking speed increased,the marking became more in distinct.The lower the frequency the narrower the Q-switch pulse width,the more easier the coating surface material is penetrated.The local morphology of marking is more easily affected by light-on delay,light-off delay and turning delay.If light-on delay is too long,the morphology of the initial part of marking would be missed.When the light-off delay increased,the depth of the terminal part of marking became larger,more seriously,the coating material would be broken clown.The coating material of marking corners would also be broken down if turning delay is too long.A method to optimize 532nm green laser parameters according to marking morphology is proposed to improve the consistency and stability of marking quality on different coating material with different production batches in this paper.

关 键 词：532nm绿激光 混合集成电路(HIC) 激光标识 标刻速度 频率 Q脉冲宽度 开光延时 关光 延时 拐角延时 盐雾试验 

分 类 号：TN249[电子电信—物理电子学] TN305.94