基于形态学探针重建算法的光栅常数评定  

Grating Constant Evaluation Based on Morphological Probe Reconstruction Algorithm

作　　者：舒瀚 王生怀[1] 陈建瑜 邹春龙[1] Shu Han;Wang Shenghuai;Chen Jianyu;Zou Chunlong(Institute of Precision Measurement Technology,Hubei University of Automotive Technology,Shiyan 442002,China)

机构地区：[1]湖北汽车工业学院精密测量技术研究所,湖北十堰442002

出　　处：《湖北汽车工业学院学报》2021年第3期63-67,共5页Journal of Hubei University Of Automotive Technology

基　　金：国家自然科学基金(51675167);湖北省高等学校优秀中青年科技创新团队计划项目(T2020018);湖北省自然科学基金(2020CFB755);湖北省教育厅科学研究计划资助项目(Q20191801)。

摘　　要：为了消除原子力显微镜(atomic force microscopy,AFM)在测量光栅常数时探针和噪声造成的光栅常数评定误差,利用MATLAB对不同形状参数的探针扫描图像进行仿真。分析了探针结构对扫描结果的影响,提出基于形态学探针重建算法评定光栅常数,通过标定方式和改进Garcia探针模型进行形态学探针重建来消除探针和噪声误差。实验结果表明:该算法提高了实际AFM测量光栅常数的精确度。In order to eliminate the error of grating constant evaluation caused by probe and noise when measuring grating constant by atomic force microscopy(AFM),the scanning images of probes with different shape parameters are simulated by MATLAB.The influence of probe structure on scanning results was evaluated.A reconstruction algorithm based on morphological probe was proposed to evaluate grating constant.The calibration method and improved Garcia probe model were used to reconstruct the morphological probe to eliminate the probe and noise errors.The experimental results show that the algorithm is effective and can improve the accuracy of grating constant measurement by AFM.

关 键 词：光栅常数 AFM 探针重建算法 形态学 MATLAB 

分 类 号：TP391.41[自动化与计算机技术—计算机应用技术] TH742[自动化与计算机技术—计算机科学与技术]