关于检测抛物面反射镜质量的技术研究  

Technical research on testing the quality of parabolic mirror

作　　者：张恒 付旭东 陈培锋[1] 王钇苏 王英[1] 龚磊 蔡雯 ZHANG Heng;FU Xudong;CHEN Peifeng;WANG Yisu;WANG Ying;GONG Lei;CAI Wen(School of Optics and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China)

机构地区：[1]华中科技大学光学与电子信息学院,武汉430074

出　　处：《激光技术》2021年第6期740-744,共5页Laser Technology

摘　　要：为了对小尺寸抛物面反射镜进行质量检测,采用平行光聚焦的方法测量焦距,旋转被测反射镜的方法测量偏心角,再结合图像处理的方法测量弥散斑大小,并提出了一种减小测量误差的方法;对这些测量方法进行了理论分析和实验验证,得到了待测反射镜的焦距、偏心角和弥散斑大小。结果表明,焦距的相对误差在0.1%以内,偏心角误差在7%以内,弥散斑大小小于0.2mm,测量结果可靠。该方案设计为其它小口径的非球面的检测提供了很好的思路,并且为减小测量误差、提高测量精度提供了很好的研究方法。In order to inspect the quality of the small-size parabolic mirrors,the focal length was measured by the parallel light focusing method,the eccentric angle was measured by rotating the measured mirror.The size of the dispersion spot was measured by combing with the image processing method,and a reduction measurement was proposed.Theoretical analysis and experimental verification of these measurement methods were carried out.The focal length,eccentric angle and size of the diffuse spot of the mirror under test were obtained.The results show that the relative error of the focal length is within 0.1%,the error of the eccentric angle is within 7%,the size of the dispersion spot is less than 0.2mm,and the measurement result is reliable.The design of this scheme provides a good idea for the detection of other small-caliber aspheric surfaces,and provides a good research method for reducing measurement errors and improving measurement accuracy.

关 键 词：测量与计量 光电检测 抛物面反射镜 弥散斑 焦距 光轴偏角 

分 类 号：TN247[电子电信—物理电子学]