异种金属氧化物辅助激光刻蚀蓝宝石的研究  

Study on laser etching of sapphire assisted by dissimilar metal oxides

作　　者：杨富理 袁根福 李浩 YANG Fuli;YUAN Genfu;LI Hao(School of Mechanical Engineering, Jiangnan University, Wuxi 214122, China)

机构地区：[1]江南大学机械工程学院,无锡214122

出　　处：《激光技术》2021年第6期756-761,共6页Laser Technology

基　　金：国家自然科学基金资助项目(51175229)。

摘　　要：为了提高蓝宝石对普通红外激光的吸收效率,采用金属氧化物涂层辅助1064nm红外光纤激光器刻蚀蓝宝石。通过单因素研究方法,研究了不同金属氧化物涂层的刻槽阈值以及激光能量和金属氧化物涂层对刻蚀率的影响,对6种金属氧化物涂层辅助激光刻蚀的差异以及刻蚀机理进行了理论分析和实验验证。结果表明,TiO_(2)涂层的刻槽阈值最低约为8.5J/cm^(2)、激光能量为77.7J/cm^(2)时,TiO_(2)涂层的刻蚀率最高约为107.3×10^(4)μm^(3)/s;刻蚀率随着激光能量的增大先增大后趋于平缓且有所降低;刻槽阈值和刻蚀率主要与涂层吸收激光能力、热导率以及熔沸点有关,其中受涂层吸收激光能力和熔沸点的影响较大。此研究结果对激光加工蓝宝石的工业应用提供一定的技术基础。In order to improve the absorption efficiency of sapphire for ordinary infrared lasers,a metal oxide coating was used to assist 1064nm infrared fiber laser to etch sapphire.Through the single factor research method,the groove threshold of different metal oxide coatings and the influence of laser energy and metal oxide coating on the etching rate were studied.The theoretical analysis and experimental verification of the different reasons and mechanisms of the six metal oxide coatings assisted laser etching were carried out.The results show that the minimum groove threshold of TiO_(2)coating is about 8.5J/cm^(2),and the highest etching rate of TiO_(2)coating is about 107.3×10^(4)μm^(3)/s when the laser energy is 77.7J/cm^(2);the etching rate first increases with the increase of laser energy and then tends to be gentle and decreases.The groove threshold and the etching rate are mainly related to the laser absorption ability,thermal conductivity and melting boiling point of the coating,and the laser absorption ability and melting boiling point of the coating are more affected.This research result provides a certain technical basis for the industrial application of laser processing sapphire.

关 键 词：激光技术 激光刻蚀 金属氧化物涂层 蓝宝石 

分 类 号：TN249[电子电信—物理电子学]