通孔电极对正装LED光电性能影响的研究  

Study on the Influence of Through-hole Electrode on the Photoelectric Performance of Formal LED

作　　者：戴泽毫 陈斯盼 温俊杰 陈仁 梁宏辉 周兰君 李进 梁晓东 魏美霞 DAI Zehao;CHEN Sipan;WEN Junjie;CHEN Ren;LIANG Honghui;ZHOU Lanjun;LI Jin;LIANG Xiaodong;WEI Meixia(School of Physics and Photoelectric Engineering,Foshan University,Foshan 528000,China;Guangdong-HongKong-Macao Joint Laboratory for Intelligent Micro-Nano Optoelectronic Technology,Foshan 528000,China;Foshan Nationstar Semiconductor Co.,Ltd.,Foshan 528000,China)

机构地区：[1]佛山科学技术学院物理与光电工程学院,广东佛山528000 [2]佛山科学技术学院粤港澳智能微纳光电技术联合实验室,广东佛山528000 [3]佛山市国星半导体技术有限公司,广东佛山528000

出　　处：《中国照明电器》2021年第6期11-18,共8页China Light & Lighting

基　　金：粤港澳智能微纳光电技术联合实验室(2020B1212030010);佛山市科学技术局项目"佛山市智慧植物工厂工程技术研究中心"(FS0AA-KJ819-4901-004);佛山科学技术学院实验室开放创新基金一般项目"自然光光谱模拟设计"(KFCX2021-B137);2021年度佛山科学技术学院学生学术基金立项项目资助(xsjj202105zrb10)。

摘　　要：传统LED的电极为圆环电极加电流扩展线,需要刻蚀部分有源层,减少发光面积,导致LED芯片亮度降低。本文采用光刻刻蚀法在电流拓展层表面制作3个及以上的电极通孔,使连续的电流扩展线变成不连续的电极孔洞,从而在理论上提高发光效率。通过高温加速老化试验,测试通孔电极结构的LED芯片发光效率、光衰等光电性能参数,并通过发光分布测试通孔电极对电流拓展能力的改变。结果表明,优化电极结构后LED总体亮度水平可提升4%~6%,且电流拓展能力增强,光衰减少,芯片寿命提高,可直接减少工艺步骤,单片节约工艺流程时间约9 h,提高生产效率。The traditional LED electrode is ring electrode plus current expansion line,which needs to etch part of the active layer,reduce the luminous area,resulting in the LED chip brightness reduction.In this paper,lithography etching method is used to make three or more electrode through-holes on the surface of the current expansion layer,so that the continuous current expansion line becomes a discontinuous electrode hole,thus improving the luminous efficacy in theory.The luminous efficacy,light decay and other photoelectric parameters of LED chip with through-hole electrode structure were tested by means of high temperature accelerated aging test,and the change of current expansion capacity of through-hole electrode was tested by means of luminous distribution.After optimizing the electrode structure,the overall brightness of LED can be increased by four to six percent,and the current expansion ability can be enhanced,the light decay can be reduced,and the chip life can be improved.At the same time,the process steps can be directly reduced,and the process time of a single chip can be saved about nine hours,and the production efficiency can be improved.

关 键 词：正装LED 电流拓展线 通孔电极 发光效率 光衰 

分 类 号：TM923.34[电气工程—电力电子与电力传动]