基于COMSOL的声表面波器件二维等效模型设计  

Design of Two-Dimensional Equivalent Model of Surface Acoustic Wave Device Based on COMSOL

作　　者：王巍 周杨春 王方 谭纪伟 滕洪菠 王华东 WANG Wei;ZHOU Yangchun;WANG Fang;TAN Jiwei;TENG Hongbo;WANG Huadong(Key Laboratory of Microelectronic Engineering, Chongqing University of Posts and Telecommunications, Chongqing 400065, China)

机构地区：[1]重庆邮电大学微电子工程重点实验室,重庆400065

出　　处：《压电与声光》2021年第5期605-608,共4页Piezoelectrics & Acoustooptics

基　　金：重庆市科技局科技重大专项基金资助项目(cstc2018jszx-cyztzxX0054);重庆市教委基金资助项目(KJQN201800628)。

摘　　要：利用COMSOL软件建立了声表面波(SAW)单端口谐振器和双端口滤波器的二维等效模型,基于有限元法通过该模型计算了完整的SAW谐振器和梯形滤波器结构的导纳和频率响应特性,并将该结果与通过COM耦合模型模拟的结果进行对比。结果表明,基于有限元法利用二维等效模型模拟SAW器件性能是可行的。同时研究了电极电阻和传播损耗对谐振器导纳的影响,为进一步研究SAW器件特性提供了理论依据。The two-dimensional equivalent model of surface acoustic wave(SAW)one-port resonator and dual-port filter was established using COMSOL multiphysics software.Based on the finite element method,the admittance and frequency response characteristics of the complete SAW resonator and ladder filter structure are calculated through the model,and the results are compared with those obtained by the simulation of COM coupling model.The results show that it is feasible to simulate the performance of SAW devices by using two-dimensional equivalent model based on finite element method.At the same time,the influences of electrode resistance and propagation loss on the admittance of SAW resonator are investigated.The study provides a theoretical basis for further investigation on the characteristics of SAW devices.

关 键 词：声表面波(SAW)谐振器 梯形滤波器 二维等效模型 有限元法 COM耦合参数 

分 类 号：TN713[电子电信—电路与系统] TN65