一种基于同心圆环电极的压电传声器  

A Piezoelectric Microphone Based on Concentric Ring Electrodes

作　　者：郑剑锋[1] 周赟 张晗[2,3] 丁树久 白碧超[1,2,3] 吕宜生 ZHENG Jianfeng;ZHOU Yun;ZHANG Han;DING Shujiu;BAI Bichao;LYU Yisheng(School of Mechanical Engineering and Rail Transit, Changzhou University, Changzhou 213164, China;CAS Key Laboratory of Noise and Vibration, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China;School of Physical Sciences,University of Chinese Academy of Sciences,Beijing 100049, China;State Key Laboratory of Management and Control for Complex Systems,Institute of Automation,Chinese Academy of Sciences, Beijing 100190, China)

机构地区：[1]常州大学机械与轨道交通学院,江苏常州213164 [2]中国科学院声学研究所噪声与振动重点实验室,北京100190 [3]中国科学院大学物理科学学院,北京100049 [4]中国科学院自动化研究所复杂系统管理与控制国家重点实验室,北京100190

出　　处：《压电与声光》2021年第5期616-619,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(11772349,11972354)。

摘　　要：传声器作为一种常见的声-电信号能量转换器已广泛应用于各行各业。压电传声器因具有防水、防尘、功耗低及高信噪比等优点而应用广泛。为了提高传声器中压电传声器在低压下的灵敏度,该文设计了一种基于同心圆环电极的压电传声器。对圆形压电片表面的全涂覆电极进行离散化设计,分离出4对独立电极。根据理论分析及COMSOL仿真模型设计发现,4对电极输出端的串联级联可使传声器的输出端电压提高3倍以上。As a common energy converter of acoustoelectric signals,the microphone is widely used in various industries.Especially,the piezoelectric microphone has a wide range of applications because of its waterproof,dustproof,low power consumption and high signal-to-noise ratio.In this paper,we designed a piezoelectric microphone based on concentric ring electrode in order to improve the sensitivity of the piezoelectric microphone under low voltage.We discretized the fully coated electrodes on the surface of circular piezoelectric plates and separated four pairs of independent electrodes.According to the theoretical analysis and design of CMOSOL simulation model,it is found that the cascade of the output ports of the four pairs of electrodes can increase the output voltage of the microphone by more than 3 times.

关 键 词：压电传声器 同心环电极 串联电极 高输出电压 

分 类 号：TM28[一般工业技术—材料科学与工程] TB54[电气工程—电工理论与新技术]