MEMS压电式矢量水听器仿真与结构优化  

Simulation and Structure Optimization of MEMS Piezoelectric Vector Hydrophone

作　　者：樊青青 李俊红[1] 翟禹光 FAN Qingqing;LI Junhong;ZHAI Yuguang(Institute of Acoustic, Chinese Academy of Sciences, Beijing 100190,China;University of Chinese Academy of Sciences, Beijing 100049,China)

机构地区：[1]中国科学院声学研究所,北京100190 [2]中国科学院大学,北京100049

出　　处：《压电与声光》2021年第5期684-688,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(11474304,11874388)。

摘　　要：针对微机电系统(MEMS)矢量水听器灵敏度低的问题,该文主要采用有限元频域分析法对一种新型结构的MEMS压电式矢量水听器进行了仿真与结构优化。对于一种新型具有U形槽悬臂梁结构的加速度灵敏度随压电层厚度或频率的变化进行了研究,优化了结构参数,提高了灵敏度。结果表明,当硅梁厚为16μm,压电层厚为硅梁的51%时,可使结构的加速度灵敏度达最大。与单臂悬臂梁结构相比,双U形槽结构的加速度灵敏度及相应的矢量水听器灵敏度提高了11 dB。Aiming at the problem of low sensitivity of MEMS vector hydrophone,a new structure of MEMS piezoelectric vector hydrophone was simulated and optimized by the finite element frequency domain analysis method.The variation of the acceleration sensitivity of the novel U-groove cantilever beam structure with the changes of the thickness of the piezoelectric layer or the frequency was studied,and the structural parameters were optimized and the sensitivity of the structure was improved.The results showed that when the thickness of the silicon beam was 16μm,the thickness of the piezoelectric layer was 51%of that of the silicon beam,the acceleration sensitivity maximum could be the maximum.Comparing with the single arm cantilever structure,the acceleration sensitivity and the corresponding vector hydrophone sensitivity of double U-groove structure were improved by 11 dB.

关 键 词：有限元方法 微机电系统(MEMS)矢量水听器 压电 U形槽 灵敏度 频域分析 

分 类 号：TN384[电子电信—物理电子学] TB565.1[交通运输工程—水声工程]