铜化学机械抛光的弱缓蚀剂研究  

Investigation of weak corrosion inhibitor for copper chemical mechanical polishing

作　　者：徐浩 宋恩敏 卞达 赵永武 XU Hao;SONG Enmin;BIAN Da;ZHAO Yongwu(School of Mechanical Engineering, Jiangnan University, Wuxi 214122, Jiangsu, China;Jiangsu Key Laboratory of Advanced Food Manufacturing Equipment & Technology,Wuxi 214122, Jiangsu, China)

机构地区：[1]江南大学机械工程学院,江苏无锡214122 [2]江苏省先进食品制造装备技术重点实验室,江苏无锡214122

出　　处：《金刚石与磨料磨具工程》2021年第5期32-39,共8页Diamond & Abrasives Engineering

基　　金：国家自然科学基金(51675232);江苏省自然科学基金(BK20190611)。

摘　　要：利用电化学、接触角、化学机械抛光等试验研究一种新型环保的铜缓蚀剂聚乙烯吡咯烷酮(polyvinyl pyrrolidone,PVP)的效果。结果表明:PVP在铜化学机械抛光中具有一剂多用的效果,将其与另一种环保弱缓蚀剂1,2,4–三氮唑(1,2,4–triazole,TAZ)混合使用,既能保证平坦化效果,又能实现工业生产所需的低压高去除率抛光,在粗糙度为2.28 nm时,去除率达到1291 nm/min。This study uses electrochemical,contact angle,chemical mechanical polishing and other experiments to study the effect of a new environmentally friendly potential copper corrosion inhibitor polyvinyl pyrrolidone(PVP).Experiment results show that PVP has a multi-purpose effect in copper chemical mechanical polishing.That mixing it with another environmentally friendly weak corrosion inhibitor TAZ ensures the flattening effect and environmental protection properties,and can achieve large removal of low pressure in industrial production.When the roughness is 2.28 nm,the removal rate can reach to 1291 nm/min.

关 键 词：铜 弱缓蚀剂 聚乙烯吡咯烷酮 混合缓蚀剂 

分 类 号：TG58[金属学及工艺—金属切削加工及机床] TG73