相位测量轮廓术中投影光栅的快速自校正  

Rapid self-correction of projection grating in phase measurement profilometry

作　　者：葛旭文 马峻[1,2] 陈寿宏[1,2] 郭玲 徐翠锋[1,2] GE Xuwen;MA Jun;CHEN Shouhong;GUO Ling;XU Cuifeng(School of Electronic Engineering and Automation,Guilin University of Electronic Science and Technology,Guilin Guangxi 541000,China;Guangxi Key Laboratory of Automatic Testing Technology and Instrument,Guilin University of Electronic Science and Technology,Guilin Guangxi 541000,China)

机构地区：[1]桂林电子科技大学电子工程与自动化学院,广西桂林541000 [2]桂林电子科技大学广西自动检测技术与仪器重点实验室,广西桂林541000

出　　处：《激光杂志》2021年第10期53-58,共6页Laser Journal

基　　金：国家自然科学基金(No.61671008);桂林电子科技大学研究生教育创新计划项目(No.2020YCXS097)。

摘　　要：针对数字光栅投影的相位测量轮廓术系统,提出了一种投影光栅快速自校正的新方法。在实际测量条件下,严格约束测量系统间的几何位置是不现实的。因此,参考平面上的光栅条纹常表现为梯形畸变和周期展宽畸变,传统的标定过程难以完全消除。针对这些问题,设计了一种基于空间变换的投影光栅快速自校正方法。校正过程发生在投影仪光栅输出之前,与现有的补偿校正算法相比无需计算单像素点相位误差且不局限于特定相位计算方法,简单快捷,可在数秒内完成校正。在光栅投影三维轮廓测量实验中证明了该方法的有效性。A new method of self-correcting projection grating is proposed for the phase measurement profilometry system of digital grating projection. Under the actual measurement conditions,it is not realistic to strictly constrain the geometric positions between measurement systems;therefore,the grating fringe on the reference plane is usually characterized by trapezoidal distortion and periodic widening distortion,which cannot be completely eliminated by the traditional calibration process. To solve these problems,a fast-self-correcting method of projection grating based on spatial transformation is designed. The correction process takes place before the projector grating output. Compared with the existing compensation correction algorithm,it does not need to calculate the phase error of single pixel point and is not limited to the specific phase calculation method. It is simple and fast,and can complete the correction within a few seconds. The validity of this method is proved in the experiment of 3d contour measurement of grating projection.

关 键 词：三维传感 相位测量 光栅自校正 空间变换 

分 类 号：TN29[电子电信—物理电子学]