基于嵌入式技术的准分子激光器智能控制系统  

Intelligent control system of excimer laser based on Embedded Technology

作　　者：龚玮玮[1] 张进[1] 张丽伟[1] GONG Weiwei;ZHANG Jin;ZHANG Liwei(Nanchang Institute of Technology,Nanchang 330044 China)

机构地区：[1]南昌理工学院,南昌330044

出　　处：《激光杂志》2021年第10期181-185,共5页Laser Journal

基　　金：江西省教育厅科技项目(No.180990);江西省教育厅科学技术研究项目(No.GJJ181000)。

摘　　要：传统准分子激光器智能控制系统的性能受到控制精度的影响,以提高准分子激光器智能控制系统的性能为目的,提出了基于嵌入式技术的准分子激光器智能控制系统。在嵌入式技术的基础上,通过准分子激光器MCU主控模块设计、控制信号调理电路设计和准分子激光器控制电路设计,完成了系统的硬件设计,通过设计准分子激光器智能控制算法和设计准分子激光器智能控制程序,完成了系统的软件设计,实现了准分子激光器的智能控制,测试结果表明,基于嵌入式技术的准分子激光器智能控制系统在腔体气压、激光能量、闭环控制三个方面的性能都可以满足控制要求。The performance of traditional excimer laser intelligent control system is affected by control precision. In order to improve the performance of excimer laser intelligent control system,an excimer laser intelligent control system based on embedded technology is proposed. On the basis of embedded technology,through the design of excimer laser MCU main control module,control signal conditioning circuit design and excimer laser control circuit design,the system hardware design is completed. Through the design of excimer laser intelligent control algorithm and excimer laser intelligent control program,the system software design is completed,and the excimer laser intelligence is realized The test results show that the performance of the intelligent control system of excimer laser based on embedded technology can meet the control requirements in three aspects: cavity pressure,laser energy and closed-loop control.

关 键 词：嵌入式技术 准分子激光器 智能控制 主控模块 调理电路 

分 类 号：TN249[电子电信—物理电子学]