反应性准分子激光混合气稳定性研究  

Study on the Stability of Reactive Excimer Laser Gas Mixture

作　　者：胡新明 杨志轩 蓝倪 方程 HU Xinming;YANG Zhixuan;LAN Ni;FANG Cheng(Yueyang Kaimeite Electronic Specialty Rare Gases Co. , Ltd. , Yueyang 414000, China)

机构地区：[1]岳阳凯美特电子特种稀有气体有限公司工厂,湖南岳阳414000 [2]岳阳凯美特电子特种稀有气体有限公司,湖南岳阳414000

出　　处：《低温与特气》2021年第5期19-21,45,共4页Low Temperature and Specialty Gases

摘　　要：由于一种或多种杂质(或组分)容易与其他杂质或组分以及容器内壁表面、阀门和充装系统润湿表面发生反应,反应性气体混合物的保质期通常相对较短。对关键活性组分和特定活性杂质的定期测试,包括预期会增加或作为反应产物出现的杂质。测试持续进行,直到一个或多个组分不符合规格,从生产到产品的失效之间经过的时间用于确定产品的保质期。Reactive gas mixtures typically have relatively short shelf-lives due to one or more impurities(or components)tendency to react easily with other impurities or components and the containers surface,valve,and filling system gas-wetted surfaces.Real time stability testing(RTST)is periodic testing of key reactive components and specific reactive impurities including those impurities expected to increase or appear as reaction products.The testing continues until one or more target species fall out of specification.The elapsed time between production and product failure is used to determine product shelf-life.

关 键 词：反应气体 实时稳定性测试 标准偏差 检出下限 

分 类 号：TQ117[化学工程—无机化工]