双电极联合循环工作模式下阵列电极的传感能力分析  

Sensing capability analysis of the array electrode in two-electrode combined cycle mode

作　　者：张玉燕[1,2] 贾斌 温银堂 Zhang Yuyan;Jia Bin;Wen Yintang(Key Lab of Measurement Technology and Instrumentation of Hebei Province,Yanshan University,Qinhuangdao 066004;School of Electrical Engineering,Yanshan University,Qinhuangdao 066004)

机构地区：[1]燕山大学测试计量技术及仪器河北省重点实验室,秦皇岛066004 [2]燕山大学电气工程学院,秦皇岛066004

出　　处：《高技术通讯》2021年第10期1011-1019,共9页Chinese High Technology Letters

基　　金：河北省科技计划(216Z1704G,20312202D);河北省自然科学基金(E2017203240)资助项目。

摘　　要：同面阵列电极主要基于边缘电场工作使其敏感场分布呈现软场特性,其传感能力易受外部多因素影响而降低。为了提高同面电容传感器的检测能力和检测效率,本文针对3×4同面阵列电极,提出了一种两极板联合循环激励的测量模式。通过对同面电极电势分布的有限元仿真,分析了该激励模式下的电场穿透深度。求解了阵列电极的灵敏度矩阵,根据其数据离散系数评判敏感场的均匀性。通过建立3种不同被测物场的模型,分别分析其电容数据的动态范围,并进行图像重建,采用图像相关系数比较图像质量的提升效果。结果表明,在联合循环电极激励测量模式下,阵列电极穿透深度和敏感场分布均匀性均好于单电极激励模式,重建图像更清晰地反映了待测物体的实际形态和轮廓,综合验证了阵列电极传感能力得以提高。Coplanar array electrodes work mainly based on fringe electric field to make the sensitive field distribution ex-hibit soft field characteristics,and their sensing capability is easily affected by external factors.In order to improve the detection capability and detection efficiency of the coplanar capacitive sensor,this paper proposes a two-elec-trode plate combined cycle excitation measurement mode for 3×4 coplanar array electrodes.Through the finite ele-ment simulation of the potential distribution of the coplanar array electrodes,the electric field penetration depth in this excitation mode is analyzed.The sensitivity matrix of the array electrode is solved,and the uniformity of the sensitive field is judged according to its data dispersion coefficient.By establishing models of three different meas-ured object fields,the dynamic range of their capacitance data is analyzed,and image reconstruction is performed.The image correlation coefficient is used to compare the improvement effect of image quality.The results show that in the combined cycle electrode excitation measurement mode,the penetration depth of the array electrode and the uniformity of the sensitive field distribution are better than that in the single electrode excitation mode,and the re-constructed image more clearly reflects the actual shape and contour.They comprehensively verify that the com-bined cycle excitation measurement mode can improve the sensing ability of the array electrode.

关 键 词：同面阵列电极 联合循环激励 穿透深度 敏感场 图像重建 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]