多功能三坐标仪在检测TFT玻璃基板中的应用  

Application of Multifunctional CMM in Testing TFT Glass Substrate

作　　者：周鑫 Zhou Xin(Bengbu COE Technology Co.,Ltd.Bengbu Anhui 233040)

机构地区：[1]蚌埠中光电科技有限公司,安徽蚌埠233040

出　　处：《中国玻璃》2021年第4期43-45,共3页China Glass

摘　　要：本文对多功能三坐标仪在检测TFT玻璃基板中的应用进行阐述。三坐标仪本身具备精密的位移坐标测量技术,结合光谱共焦传感器、影像探头,可准确快速的完成对高世代TFT玻璃基板的整板翘曲、整板厚度、边角尺寸的检测工作。大尺寸、多功能、高精度的三坐标仪在TFT玻璃基板检测中必将广泛应用。The application of multi-functional CMM in detecting TFT glass substrate is elaborated.CMM itself has precise displacement coordinate measurement technology.The warpage,thickness of the whole plate and rim angle size of high�generation TFT glass substrate can be accurately and quickly detected in combination with spectral confocal sensor and image probe.The large-size,multifunctional and high-precision CMM will be widely used for detecting high-generation TFT glass substrate.

关 键 词：三坐标仪 高世代 光谱共焦 翘曲 厚度 

分 类 号：TN3[电子电信—物理电子学]