双波峰响应CMOS单光子探测器的设计与优化  

Design and Optimization of Double-Wave-Peak Response CMOS Single-Photon Detector

作　　者：张维宇 汪洋 金湘亮 Zhang Weiyu;Wang Yang;Jin Xiangliang(School of Physics and Electronics,Hunan Normal University,Changsha,Huuan 410081,China)

机构地区：[1]湖南师范大学物理与电子科学学院,湖南长沙410081

出　　处：《光学学报》2021年第17期18-23,共6页Acta Optica Sinica

基　　金：国家自然科学基金(61827812);湖湘高层次人才聚集工程(2019RS1037);湖南省科技厅项目(2020GK2018,2019GK4016,2020RC1003)。

摘　　要：随着科学技术的不断发展,单光子雪崩光电二极管(SPAD)在极弱光探测领域起着不可或缺的作用。但是,在需要同时进行可见光和红外光的应用场景下,单一波峰响应的SPAD往往独木难支,而采用多个单波峰器件又降低了整个系统的集成度。为解决这一问题,设计了一种分别在可见光区和红外光区响应的双波峰SPAD。为确保该器件能实现预期的功能,首先利用半导体工艺器件仿真软件(TCAD)来验证该器件的合理性,再通过搭建外部淬灭电路来测试SPAD的各项性能参数。测试结果显示,该器件的雪崩击穿电压为12.75 V。在22℃的室温条件下(过偏压为0.5 V),SPAD的光子探测概率在520 nm处达到32%,在840 nm处达到12%。此外,当过偏压为1 V时,其暗计数率(DCR)为1 kHz。因此,该SPAD能够实现对可见光及近红外光的双波峰探测,并且将DCR控制在一个较低的范围内。Single photon avalanche diode(SPAD)now plays an indispensable role in extremely low light detection.However,SPADs are often required possessing two response peaks under different lighting conditions,which cannot be realized in a single-wave-peak SPAD(SWP-SPAD).Moreover,the multiple SWP-SPADs responding to different wavelengths will reduce the integration of the detection system.In this work,we propose a double-wave-peak SPAD(DWP-SPAD)to detect both the visible light and the near infrared light.We conduct the device-level simulation by means of the technology of the computer-aided design,and build an external quenching circuit to measure key parameters.The test results show that the breakdown voltage of the SPAD is 12.75 V.Under experimental conditions of 22℃and the excess bias voltage of 0.5 V,there are two peaks of the SPAD’s photon detection probability,32%at 520 nm and 12%at 840 nm,respectively.When the over-bias voltage is 1 V,the dark count rate(DCR)is 1 kHz.Therefore,the proposed SPAD can achieve double-wave-peak detection at a low DCR.

关 键 词：单光子雪崩光电二极管 极弱光探测 雪崩击穿电压 光子探测概率 暗计数率 

分 类 号：TN364[电子电信—物理电子学]