基于物镜耦合的波长-角度共同调制表面等离激元共振传感器  

Objective-Coupled Wavelength and Angle Co-Modulated Surface Plasmon Resonance Sensor

作　　者：王畅 王雪 孙旭晴 魏茹雪 刘虹遥[1] 孙晓娟 王飞 路鑫超[1] 黄成军[1,2] Wang Chang;Wang Xue;Sun Xuqing;WeiRuxue;Liu Hongyao;Sun Xiaojuan;Wang Fei;Lu Xinchao;Huang Chengjun(Health Electronics Center,Institute of Microelectronics of Chinese Academy of Sciences,Beijing 100029,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院微电子研究所健康电子研发中心,北京100029 [2]中国科学院大学,北京100049

出　　处：《光学学报》2021年第17期127-134,共8页Acta Optica Sinica

基　　金：国家重点研发计划(2020YFC2004503,2016YFC0900200,2017YFF0107002);国家自然科学基金(61604175);北京市自然科学基金(4192063、4182073);中国科学院科研装备研制项目(YJKYYQ20190056);广州市科技计划项目(201604020005);广东省科技计划项目(2016A040403086);清华大学环境模拟与污染控制国家重点联合实验室开放课题(18K07ESPCT)。

摘　　要：基于棱镜耦合的波长调制表面等离激元共振(SPR)传感器只能在长波段获得较高检测灵敏度,无法兼顾检测范围与检测灵敏度。研究了一种基于物镜耦合激发表面等离激元的波长-角度共同调制的SPR传感装置,使用物镜耦合使角度易于调节,这提高了SPR传感器在短波处的检测灵敏度,从而在较大检测范围内实现了高灵敏度折射率测量。通过理论仿真与实验,使用波长-角度共同调制的SPR传感方法对不同浓度的葡萄糖溶液的折射率进行测量,动态检测范围为4.4×10-2 RIU,检测灵敏度达到5066.97 nm/RIU。相较于波长调制SPR传感方法,使用波长-角度共同调制的SPR传感方法在检测范围不变的情况下,检测灵敏度提高了2.5倍。该检测方法实现了对折射率高灵敏度、高动态检测范围的快速检测,可广泛应用在生物医学及食品安全等领域。Wavelength-modulated surface plasmon resonance(SPR)sensors based on prism coupling can obtain high detection sensitivity only in the long-wavelength band but cannot take both detection range and detection sensitivity into account.In this work,we proposed a wavelength and angle co-modulated SPR sensor using the surface plasmons excited by objective-coupling.Through angle adjustment via objective coupling,the detection sensitivity of the SPR sensor in the short-wavelength band is improved,and the refractive index is measured with high sensitivity in a large detection range.Through simulations and experiments,the refractive indices of glucose solutions with different concentration were measured with the proposed method.The dynamic detection range is 4.4×10-2 RIU,and the detection sensitivity is 5066.97 nm/RIU.In comparison with the wavelength-modulated SPR sensing method,the detection sensitivity of the wavelength and angle co-modulated SPR sensing method is increased by 2.5 times in the same detection range.This method achieves the real-time and rapid detection of refractive indices with high sensitivity in a large dynamic detection range,and it can be widely applied to biomedicine,food safety,and other fields.

关 键 词：表面光学 表面等离激元共振 折射率测量 波长调制 角度调制 

分 类 号：O436.2[机械工程—光学工程]