基于微机电系统波纹振膜的高灵敏度光纤传声器  

High Sensitive Fiber Optic Microphone with Micro-Electro-Mechanical System Corrugated Diaphragm

作　　者：王坤博[1] 周瑜[1] 刘超[1] 魏晓村 Wang Kunbo;Zhou Yu;Liu Chao;Wei Xiaocun(The Third Research Institute of China Electronics Technology Group Corporation,Beijing 100015,Chma)

机构地区：[1]中国电子科技集团公司第三研究所,北京100015

出　　处：《光学学报》2021年第18期27-34,共8页Acta Optica Sinica

摘　　要：提出了一种基于微机电系统(MEMS)波纹振膜的高灵敏度光纤传声器,通过波纹振膜研制法布里-珀罗干涉腔,可进一步提升光纤传声器的灵敏度。在理论分析中,应用有限元分析软件COMSOL对振膜进行建模,仿真分析了波纹宽度、波纹深度和波纹间距等参数对振膜灵敏度和工作频率的影响。实验结果表明,基于MEMS波纹振膜研制的光纤传声器样机灵敏度为630 mV/Pa,频率响应范围为50 Hz~8 kHz;且该光纤传声器的结构简单,能很好地应用于远场语音拾取等领域。This paper proposes a high sensitive fiber optic microphone based on a micro-electro-mechanical system(MEMS)corrugated diaphragm.The Fabry-Perot interference cavity is obtained with the corrugated diaphragm,which can further improve the sensitivity of the fiber optic microphone.In the theoretical analysis,the finite element analysis software COMSOL is used to model the diaphragm,and the effects of the corrugation width,corrugation depth,and the separation between two corrugations on the sensitivity and working frequencies of the diaphragm are analyzed by simulation.The experimental results show that the sensitivity of the fiber optic microphone based on the MEMS corrugated diaphragm is 630 mV/Pa,and the frequency response range is 50 Hz--8 kHz;and the structure of the fiber optic microphone is simple,which can be well used in the fields of far-field speech recognition and so on.

关 键 词：光纤光学 传声器 波纹振膜 远场语音拾取 

分 类 号：TN29[电子电信—物理电子学]