一种基于旋转光场的高精度角位移测量方法研究  

High-Precision Angular Displacement Measurement Based on Rotating Optical Field

作　　者：付敏[1] 陈凡 朱革 石海林 魏晓波 乔俊红 冷从阳 Fu Min;Chen Fan;Zhu Ge;Shi Hailin;Wei Xiaobo;Qiao Junhong;Leng Congyang(Engineering Research Center of Mechanical Testing Technology and Equipment(Ministry of Educatioyi),Chongqing Keif Laboratory of Time-Grating Sensing and Advanced Testing Technology,Chongqing University of Tecfmology,Chongqing 400054,China;College of Mechanical Engineering,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,时栅传感及先进检测技术重庆市重点实验室,重庆400054 [2]重庆理工大学机械工程学院,重庆400054

出　　处：《光学学报》2021年第18期110-119,共10页Acta Optica Sinica

基　　金：国家自然科学基金(51875070);重庆市教委科学技术研究项目(KJQN201801105);重庆理工大学研究生创新项目(clgycx20202077);中国博士后科学基金(2021M693749)。

摘　　要：针对传统高精度角位移测量方法中,存在制造工艺复杂、多测头结构复杂且安装困难等问题,提出一种基于旋转光场且整周封闭的高精度角位移测量方法。该方法借鉴旋转磁场产生原理,在整个圆周面上均布正弦型透光面,等间隔地将整圈透光面分成0°、90°、180°和270°四组,用单路交变光场为整周封闭的透光面提供交变光强信号,经光电转换和微控移相合成一路电行波信号,最后利用高频时钟脉冲对参考信号与电行波信号的相位差进行插补,实现了角度测量。通过搭建实验平台,对不同的原理样机进行对比实验,实验验证了制造精度和对极数对测量误差的影响,在整周360°测量范围内,采用圆心角为2°的等分透光栅面,测量误差可达±5.0″。由于测量误差主要由周期性误差成分组成,通过修正谐波误差以及提高光场分布质量,其测量精度还将有较大的提升空间。验证了该方法对制造和安装误差的抑制效果,为采用低精度制造工艺实现高精度测量提供了一种有效的实现方案。To tackle the problems in traditional high-precision angular displacement measurement,such as complicated manufacturing process,complex multi-probe structure and difficult installation,this paper proposes a new relevant full-circle method based on the construction of a rotating optical field,inspired by the generation principle of a rotating magnetic field.A sinusoidal uniform grating surface on the full circle is divided by an equal interval into four groups of 0°,90°,180°,and 270°.Alternating light intensity signals are provided for the full-circle grating surface by a one-way alternating optical field,which are transformed into electric traveling wave signals via photoelectric conversion and micro-controlled phase shift.The angular displacement measurement is realized by the interpolation of the phase difference between reference signals and electric traveling wave signals with a high-frequency clock pulse.An experimental platform is established for the comparative experiment on different principle prototypes.The influence of manufacturing precision and number of pole pairs on the measurement error is verified by experiments.The measurement error can reach±5.0″when the grating surface with a central angle of 2°is used in the full-circle measurement range.Since the measurement error is mainly composed of periodic error components,the measurement precision will be greatly improved after the correction of harmonic error and the quality improvement of optical field distribution.This paper verifies the suppressing effect of the proposed method on manufacturing and installation errors and provides an effective solution to the high-precision measurement for low-precision manufacturing processes.

关 键 词：测量 旋转光场 角位移 交变光场 光场分布 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置]