温度对激光干涉法测量气体动态压力的影响  

Influence of temperature on the measurement of gas dynamic pressure by laser interferometry

作　　者：李博 杨军[1] 谢兴娟[1] 段小艳[1] LI Bo;YANG Jun;XIE Xingjuan;DUAN Xiaoyan(Changcheng Institute of Metrology&Measurement,Beijing 100095,China)

机构地区：[1]北京长城计量测试技术研究所,北京100095

出　　处：《光学技术》2021年第5期565-569,581,共6页Optical Technique

基　　金：国家自然科学基金(51775526)。

摘　　要：利用气体折射率与压力之间的关系,可采用激光干涉仪对气体动态压力进行非接触测量,研究了温度对激光干涉法测量气体动态压力的影响。通过量子力学角度对气体状态方程进行维里展开,建立气体压力与折射率的模型,基于Edlen经验公式进行最新修正,探究了温度对激光干涉法测量气体动态压力的影响。结果表明,在低压范围内静态压力一定时,-20~80℃范围内温度变化与气体折射率成反比,折射率的改变量约为10^(-6)/℃,每1℃的温度变化相当于产生311.47Pa压力,温度改变对气体低压测量影响较大,应保证测量范围内温度控制优于±0.05℃,才能满足激光干涉法测量气体动态压力的要求。Based on the relationship between the refractive index and the pressure of gas,the dynamic pressure of gas can be measured non-contact by laser interferometer.At the same time,the influence of temperature on the measurement of gas dynamic pressure by laser interferometry was studied.The virial expansion of gas equation of state was carried out from the angle of quantum mechanics,and the model of gas pressure and refractive index was established.Based on the latest correction of Edlen equation,the influence of temperature on the measurement of gas dynamic pressure by laser interferometry is explored.The results show that when the pressure is constant in the low pressure range,the temperature change in the range of-20~80℃is inversely proportional to the refractive index of the gas,and the change of the refractive index is about 10^(-6)/℃.The temperature change of 1℃is equivalent to the pressure 311.47 Pa.The temperature change has a great influence on the measurement of gas at low pressure.It should be ensured that the temperature control is better than±0.05℃,so as to meet the requirements of dynamic pressure measurement by laser interferometry.

关 键 词：激光干涉法 温度 折射率 维里方程 压力测量 

分 类 号：O439[机械工程—光学工程] TB935[理学—光学]