折叠式离轴三反光学系统设计与装调  

Design and Alignment of Folded Off-Axis Three-Mirror Optical System

作　　者：陈太喜 伍雁雄 宋绍漫 李淑贤 Chen Taixi;Wu Yanxiong;Song Shaoman;Li Shuxian(Ji Hua Laboratoryy Foshan,Guangdong 528200,China;School of Physics and Optoelectronic Engineering,Foshan University,Foshan,Guangdong 528200,China)

机构地区：[1]季华实验室,广东佛山528200 [2]佛山科学技术学院物理与光电工程学院,广东佛山528200

出　　处：《激光与光电子学进展》2021年第17期355-361,共7页Laser & Optoelectronics Progress

基　　金：国家自然科学基金面上基金(61771139)。

摘　　要：在同轴三反光学系统成像理论的基础上,通过孔径光阑离轴及平面反射镜折叠光路,设计一个折叠式离轴三反光学系统。全视场范围内,光学系统在奈奎斯特特征频率为62.5 lp/mm处,调制传递函数的设计值优于0.58,成像质量接近衍射极限。基于光学干涉检测技术和计算机辅助装调理论,建立初级像差与光学元件失调量的灵敏度矩阵并分析失调光学系统的像差特性,在此基础上提出具体有效的光学精密装调方案。整机装调后光学系统全视场波像差的均方根值优于1/14λ(λ为波长)。使用相机对准模拟无穷远处的目标,在探测器极限分辨率为62.5 lp/mm处可以成像清晰,性能优异。Based on the imaging theory of the coaxial three-mirror optical system,a folded off-axis three-mirror optical system is designed through the aperture diaphragm off-axis and the flat mirror to fold the optical path.In the full field of view,the design value of the modulation transfer function of the optical system at the Nyquist characteristic frequency of 62.5 lp/mm is better than 0.58,and the imaging quality is close to the diffraction limit.Based on optical interference detection technology and computer-aided assembly and adjustment theory,the sensitivity matrix of primary aberration and optical component misalignment are established,and the aberration characteristics of the misaligned optical system are analyzed,and on this basis,a specific and effective optical precision assembly adjustment scheme is proposed.After the whole machine is installed and adjusted,the root mean square value of the wave aberration of the optical system in the whole field of view is better than1/14λ(λis wavelength).Using the camera to simulate the target at infinity,the image can be clearly imaged at the62.5 lp/mm limit resolution of the detector,and the performance is excellent.

关 键 词：光学设计 三反系统 计算机辅助装调 灵敏度矩阵 

分 类 号：TH745[机械工程—光学工程]