高精度谐振式硅微压力传感器的信号采集与误差补偿技术研究  

Research on Data Acquisition and Error Compensation of High-precision Silicon Resonant Pressure Sensor

作　　者：潘敏杰 王岩 周国辉 PAN Min-jie;WANG Yan;ZHOU Guo-hui(Jiaxing Synargy Micro-electronics Technology Co.,LTD.,Jiaxing 314000,China)

机构地区：[1]嘉兴市纳杰微电子技术有限公司,浙江嘉兴314000

出　　处：《新一代信息技术》2021年第14期26-31,40,共7页New Generation of Information Technology

摘　　要：谐振式硅微压力传感器是一种通过检测机械结构谐振频率的变化来感知外界压力的高精度压力传感器。其特点是尺寸小、精度高、稳定性好,具有广阔的应用前景。高精度频率输出信号的采集与建模补偿是提高谐振式压力传感器输出精度的重要手段之一。在分析谐振式压力传感器工作机理的基础上,分析和对比了不同频率采集方案,提出了一种高精度硅微谐振式压力传感器用数据采集与参数补偿方法,给出了设计思路和实现方法。所设计的数据采集与输出补偿系统,针对中心频率为30 kHz,量程为350 kPa的产品,数据更新时间为100 ms,采集系统频率分辨率为0.005 Hz,等效气压分辨率为0.35 Pa,制备的谐振式硅微压力传感器样机,综合精度优于0.01%。The resonant pressure sensor measures applied pressure by detecting the change of resonant frequency of mechanical resonator.It is characterized by small size,high accuracy and excellent stability and showing broad application aeras.Data acquisition and error compensation is one of the important ways to improve accuracy for high-precision silicon resonant pressure sensor.Based on analyzing the working principle of resonant pressure sensor,the paper presents a new method of frequency signal acquisition and error compensation design to improve the performance of the high-precision pressure sensor by analyzing and comparing the other schemes.The design thought and implement method is researched.The system can acquire resolution with±0.005Hz,corresponding to 0.35Pa in 100 ms on condition that the normal frequency of 30 kHz,and a measuring range of 350kPa.The experimental prototype’s comprehensive precision is superior to 0.01%.

关 键 词：谐振式 压力传感器 外部中断 输入捕获 样机 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]