钝感氮化钽桥膜换能元制备研究  

Research on Preparation of Insensitive TaN Bridge Film Transducer

作　　者：任小明[1] 陈建华[1] 丁跃伟 刘红娥 张菲 张晶鑫[1] 姚洪志[1] REN Xiao-ming;CHEN Jian-hua;DING Yue-wei;LIU Hong-e;ZHANG Fei;ZHANG Jing-xin;YAO Hong-zhi(Science and Technology on Applied Physical Chemistry Laboratory,Shaanxi Applied Physics and Chemistry Research Institute,Xi'an,710061)

机构地区：[1]陕西应用物理化学研究所应用物理化学重点实验室,陕西西安710061

出　　处：《火工品》2021年第5期6-9,共4页Initiators & Pyrotechnics

摘　　要：为满足钝感起爆/点火的需求,采用氮化钽作为换能元桥区材料,在桥区结构、参数设计的基础上,对剥离、溅射和热处理等关键工艺进行了研究。参照国家军用标准GJB 5309.10-2004,对制作完成的氮化钽桥膜换能元的不发火电流、发火电流进行了测试。结果表明,采用多次间隔溅射和热处理等工艺,实现了氮化钽桥膜换能元桥区的厚膜图形化,并且氮化钽换能元可实现直流3A9W5min不发火、直流5A发火。In order to meet the demand of insensitive initiation and ignition,TaN was used as the material of the bridge area of the transducer element.Based on the structure and parameter design of the bridge area,the key processes such as stripping,sputtering and heat treatment were studied in this paper.According to the national military standard GJB 5309.10-2004,the no-fire current and firing current of the fabricated TaN bridge film transducer were tested.By the use of multiple interval sputtering and heat treatment,the thick film pattern of the bridge area of TaN bridge transducer was obtained,and the TaN transducer could be no fire under DC 3A9W5min,and fire under DC 5A condition.

关 键 词：火工品 TaN换能元 钝感 点火 工艺 

分 类 号：TJ450.3[兵器科学与技术—火炮、自动武器与弹药工程]